A micro-machined resonator

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Description

This invention is comprised of a micro-machined resonator, typically quartz, with upper and lower micromachinable support members, or covers, having etched wells which may be lined with conductive electrode material, between the support members is a quartz resonator having an energy trapping quartz mesa capacitively coupled to the electrodes through a diaphragm; the quartz resonator is supported by either micro-machined cantilever springs or by thin layers extending over the surfaces of the support. If the diaphragm is rigid, clock applications are available, and if the diaphragm is resilient, then transducer applications can be achieved. Either the thin support layers or ... continued below

Physical Description

19 p.

Creation Information

Godshall, N.A.; Koehler, D.R.; Liang, A.Y. & Smith, B.K. December 31, 1991.

Context

This patent is part of the collection entitled: Office of Scientific & Technical Information Technical Reports and was provided by UNT Libraries Government Documents Department to Digital Library, a digital repository hosted by the UNT Libraries. More information about this patent can be viewed below.

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Publisher

  • Sandia National Laboratories
    Publisher Info: Sandia National Labs., Albuquerque, NM (United States)
    Place of Publication: Albuquerque, New Mexico

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Description

This invention is comprised of a micro-machined resonator, typically quartz, with upper and lower micromachinable support members, or covers, having etched wells which may be lined with conductive electrode material, between the support members is a quartz resonator having an energy trapping quartz mesa capacitively coupled to the electrodes through a diaphragm; the quartz resonator is supported by either micro-machined cantilever springs or by thin layers extending over the surfaces of the support. If the diaphragm is rigid, clock applications are available, and if the diaphragm is resilient, then transducer applications can be achieved. Either the thin support layers or the conductive electrode material can be integral with the diaphragm. In any event, the covers are bonded to form a hermetic seal and the interior volume may be filled with a gas or may be evacuated. In addition, one or both of the covers may include oscillator and interface circuitry for the resonator.

Physical Description

19 p.

Notes

OSTI as DE94005164

Source

  • Other Information: PBD: 1991

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Identifier

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  • Other: DE94005164
  • Report No.: PATENTS-US--A7803815
  • Grant Number: AC04-76DP00789
  • Office of Scientific & Technical Information Report Number: 140464
  • Archival Resource Key: ark:/67531/metadc625497

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Office of Scientific & Technical Information Technical Reports

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Creation Date

  • December 31, 1991

Added to The UNT Digital Library

  • June 16, 2015, 7:43 a.m.

Description Last Updated

  • April 13, 2016, 3 p.m.

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Citations, Rights, Re-Use

Godshall, N.A.; Koehler, D.R.; Liang, A.Y. & Smith, B.K. A micro-machined resonator, patent, December 31, 1991; Albuquerque, New Mexico. (digital.library.unt.edu/ark:/67531/metadc625497/: accessed September 19, 2017), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.