Experimental investigation of beryllium-based multilayer coatings for extreme ultraviolet lithography

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The performance of beryllium-based multilayer coatings designed to reflect light of wavelengths near 11 nm, at normal incidence, is presented. These multilayer coatings are of special interest for extreme ultraviolet lithography (EUVL). The beryllium-based multilayers investigated were Mo/Be, Ru/Be and a new material combination Mo,CiBe. The highest reflectivity achieved so far is 70% at 11.3 mn with 70 bilayers of Mo/Be. However, even though high reflectivity is very important, there are other parameters to satisfy the requirements for an EUVL production tool. Multilayer stress, thermal stability, radiation stability and long term reflectance stability are of equal or greater importance. An ... continued below

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Bajit, S.; Behymer, R. D.; Folta, J.; Mirkarimi, P. B.; Montcalm, C.; Wall, M. A. et al. July 30, 1999.

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The performance of beryllium-based multilayer coatings designed to reflect light of wavelengths near 11 nm, at normal incidence, is presented. These multilayer coatings are of special interest for extreme ultraviolet lithography (EUVL). The beryllium-based multilayers investigated were Mo/Be, Ru/Be and a new material combination Mo,CiBe. The highest reflectivity achieved so far is 70% at 11.3 mn with 70 bilayers of Mo/Be. However, even though high reflectivity is very important, there are other parameters to satisfy the requirements for an EUVL production tool. Multilayer stress, thermal stability, radiation stability and long term reflectance stability are of equal or greater importance. An experimental characterization of several coatings was carried out to determine the reflectivity, stress, microstructure, and long term stability of these coatings. Theoretically calculated reflectivities are compared with experimental results for different material pairs; differences between experimental and theoretical reflectivities and bandwidths are addressed. Keywords: Extreme ultraviolet (EUV) lithography, reflective coatings, multilayer deposition, beryllium.

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2.2 Megabytes pages

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  • Society of Photo-Optical Instrumentation Engineers, Engineering, and Instrumentation, Society for Professional Engineers, (SPIE) 44th Annual Meeting, Denver, CO (US), 07/18/1999--07/23/1999

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  • Report No.: UCRL-JC-132917
  • Grant Number: W-7405-ENG-48
  • Office of Scientific & Technical Information Report Number: 12561
  • Archival Resource Key: ark:/67531/metadc625417

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  • July 30, 1999

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  • June 16, 2015, 7:43 a.m.

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  • May 6, 2016, 1:19 p.m.

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Bajit, S.; Behymer, R. D.; Folta, J.; Mirkarimi, P. B.; Montcalm, C.; Wall, M. A. et al. Experimental investigation of beryllium-based multilayer coatings for extreme ultraviolet lithography, article, July 30, 1999; California. (digital.library.unt.edu/ark:/67531/metadc625417/: accessed December 11, 2017), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.