Plasma cleaning techniques and future applications in environmentally conscious manufacturing

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Plasmas have frequently been used in industry as a last step surface preparation technique in an otherwise predominantly wet-etch process. The limiting factor in the usefulness of plasma cleaning techniques has been the rate at which organic materials are removed. Recent research in the field of plasma chemistry has provided some understanding of plasma processes. By controlling plasma conditions and gas mixtures, ultra-fast plasma cleaning and etching is possible. With enhanced organic removal rates, plasma processes become more desirable as an environmentally sound alternative to traditional solvent or acid dominated process, not only as a cleaning tool, but also as ... continued below

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10 p.

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Ward, P.P. July 1, 1995.

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This article is part of the collection entitled: Office of Scientific & Technical Information Technical Reports and was provided by UNT Libraries Government Documents Department to Digital Library, a digital repository hosted by the UNT Libraries. It has been viewed 14 times . More information about this article can be viewed below.

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  • Sandia National Laboratories
    Publisher Info: Sandia National Labs., Albuquerque, NM (United States)
    Place of Publication: Albuquerque, New Mexico

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Description

Plasmas have frequently been used in industry as a last step surface preparation technique in an otherwise predominantly wet-etch process. The limiting factor in the usefulness of plasma cleaning techniques has been the rate at which organic materials are removed. Recent research in the field of plasma chemistry has provided some understanding of plasma processes. By controlling plasma conditions and gas mixtures, ultra-fast plasma cleaning and etching is possible. With enhanced organic removal rates, plasma processes become more desirable as an environmentally sound alternative to traditional solvent or acid dominated process, not only as a cleaning tool, but also as a patterning and machining tool. In this paper, innovations in plasma processes are discussed including enhanced plasma etch rates via plasma environment control and aggressive gas mixtures. Applications that have not been possible with the limited usefulness of past plasma processes are now approaching the realm of possibility. Some of these possible applications will be discussed along with their impact to environmentally conscious manufacturing.

Physical Description

10 p.

Notes

OSTI as DE95014839

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  • 27. international technical conference of the Society for the Advancement of Material and Process Engineering (SAMPE): diversity into the next century, Albuquerque, NM (United States), 9-12 Oct 1995

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  • Other: DE95014839
  • Report No.: SAND--95-0958C
  • Report No.: CONF-951033--15
  • Grant Number: AC04-94AL85000
  • Office of Scientific & Technical Information Report Number: 105862
  • Archival Resource Key: ark:/67531/metadc624686

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Office of Scientific & Technical Information Technical Reports

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  • July 1, 1995

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  • June 16, 2015, 7:43 a.m.

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  • April 13, 2016, 4:25 p.m.

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Ward, P.P. Plasma cleaning techniques and future applications in environmentally conscious manufacturing, article, July 1, 1995; Albuquerque, New Mexico. (digital.library.unt.edu/ark:/67531/metadc624686/: accessed November 21, 2017), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.