Future technology challenges for failure analysis

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Description

Failure analysis is a critical element in the integrated circuit manufacturing industry. This paper explores the challenges for IC failure analysis in the environment of present and future silicon IC technology trends, using the 1994 National Technology Roadmap for Semiconductors as a technology guide. Advanced failure analysis techniques that meet the challenges of state-of-the-art IC technology are described and their applications are discussed. New paradigms will be required for failure analysis to keep pace with future advancements in IC technology.

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6 p.

Creation Information

Anderson, R.E.; Soden, J.M. & Henderson, C.L. August 1, 1995.

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This article is part of the collection entitled: Office of Scientific & Technical Information Technical Reports and was provided by UNT Libraries Government Documents Department to Digital Library, a digital repository hosted by the UNT Libraries. It has been viewed 37 times . More information about this article can be viewed below.

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  • Sandia National Laboratories
    Publisher Info: Sandia National Labs., Albuquerque, NM (United States)
    Place of Publication: Albuquerque, New Mexico

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Description

Failure analysis is a critical element in the integrated circuit manufacturing industry. This paper explores the challenges for IC failure analysis in the environment of present and future silicon IC technology trends, using the 1994 National Technology Roadmap for Semiconductors as a technology guide. Advanced failure analysis techniques that meet the challenges of state-of-the-art IC technology are described and their applications are discussed. New paradigms will be required for failure analysis to keep pace with future advancements in IC technology.

Physical Description

6 p.

Notes

OSTI as DE95016411

Source

  • ISTFA `95: 21. international symposium for testing and failure analysis, Santa Clara, CA (United States), 5-10 Nov 1995

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  • Other: DE95016411
  • Report No.: SAND--95-0624C
  • Report No.: CONF-951156--1
  • Grant Number: AC04-94AL85000
  • Office of Scientific & Technical Information Report Number: 100084
  • Archival Resource Key: ark:/67531/metadc624592

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Office of Scientific & Technical Information Technical Reports

Reports, articles and other documents harvested from the Office of Scientific and Technical Information.

Office of Scientific and Technical Information (OSTI) is the Department of Energy (DOE) office that collects, preserves, and disseminates DOE-sponsored research and development (R&D) results that are the outcomes of R&D projects or other funded activities at DOE labs and facilities nationwide and grantees at universities and other institutions.

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Creation Date

  • August 1, 1995

Added to The UNT Digital Library

  • June 16, 2015, 7:43 a.m.

Description Last Updated

  • April 13, 2016, 1:57 p.m.

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Anderson, R.E.; Soden, J.M. & Henderson, C.L. Future technology challenges for failure analysis, article, August 1, 1995; Albuquerque, New Mexico. (digital.library.unt.edu/ark:/67531/metadc624592/: accessed October 23, 2017), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.