Nitrogen implantation effects on the chemical bonding and hardness of boron and boron nitride coatings

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Boron nitride (BN) coatings are deposited by the reactive sputtering of fully dense, boron (B) targets utilizing an argon-nitrogen (Ar-N{sub 2}) reactive gas mixture. Near-edge x-ray absorption fine structure analysis reveals features of chemical bonding in the B 1s photoabsorption spectrum. Hardness is measured at the film surface using nanoindentation. The BN coatings prepared at low, sputter gas pressure with substrate heating are found to have bonding characteristic of a defected hexagonal phase. The coatings are subjected to post-deposition nitrogen (N{sup +} and N{sub 2}{sup +}) implantation at different energies and current densities. The changes in film hardness attributed to ... continued below

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94 Kilobytes pages

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Anders, S; Felter, T; Hayes, J; Jankowski, A F; Patterson, R; Poker, D et al. February 8, 1999.

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Boron nitride (BN) coatings are deposited by the reactive sputtering of fully dense, boron (B) targets utilizing an argon-nitrogen (Ar-N{sub 2}) reactive gas mixture. Near-edge x-ray absorption fine structure analysis reveals features of chemical bonding in the B 1s photoabsorption spectrum. Hardness is measured at the film surface using nanoindentation. The BN coatings prepared at low, sputter gas pressure with substrate heating are found to have bonding characteristic of a defected hexagonal phase. The coatings are subjected to post-deposition nitrogen (N{sup +} and N{sub 2}{sup +}) implantation at different energies and current densities. The changes in film hardness attributed to the implantation can be correlated to changes observed in the B 1s NEXAFS spectra.

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94 Kilobytes pages

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  • Materials Research Society, Boston, MA (US), 11/30/1998--12/02/1998

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  • Report No.: UCRL-JC-133133
  • Report No.: YN0100000
  • Grant Number: W-7405-ENG-48
  • Office of Scientific & Technical Information Report Number: 14547
  • Archival Resource Key: ark:/67531/metadc623942

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  • February 8, 1999

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  • June 16, 2015, 7:43 a.m.

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  • May 6, 2016, 3:37 p.m.

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Anders, S; Felter, T; Hayes, J; Jankowski, A F; Patterson, R; Poker, D et al. Nitrogen implantation effects on the chemical bonding and hardness of boron and boron nitride coatings, article, February 8, 1999; California. (digital.library.unt.edu/ark:/67531/metadc623942/: accessed September 24, 2017), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.