High rate PLD of diamond-like-carbon utilizing high repetition rate visible lasers

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Pulsed Laser Deposition (PLD) has been shown to be an effective method for producing a wide variety of thin films of high-value-added materials. The high average powers and high pulse repetition frequencies of lasers under development at LLNL make it possible to scale-up PLD processes that have been demonstrated in small systems in a number of university, government, and private laboratories to industrially meaningful, economically feasible technologies. A copper vapor laser system at LLNL has been utilized to demonstrate high rate PLD of high quality diamond-like-carbon (DLC) from graphite targets. The deposition rates for PLD obtained with a 100 W ... continued below

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9 p.

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McLean, W. II; Fehring, E.J.; Dragon, E.P. & Warner, B.E. September 15, 1994.

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Description

Pulsed Laser Deposition (PLD) has been shown to be an effective method for producing a wide variety of thin films of high-value-added materials. The high average powers and high pulse repetition frequencies of lasers under development at LLNL make it possible to scale-up PLD processes that have been demonstrated in small systems in a number of university, government, and private laboratories to industrially meaningful, economically feasible technologies. A copper vapor laser system at LLNL has been utilized to demonstrate high rate PLD of high quality diamond-like-carbon (DLC) from graphite targets. The deposition rates for PLD obtained with a 100 W laser were {approx} 2000 {mu}m{center_dot}cm{sup 2}/h, or roughly 100 times larger than those reported by chemical vapor deposition (CVD) or physical vapor deposition (PVD) methods. Good adhesion of thin (up to 2 pm) films has been achieved on a small number of substrates that include SiO{sub 2} and single crystal Si. Present results indicate that the best quality DLC films can be produced at optimum rates at power levels and wavelengths compatible with fiber optic delivery systems. If this is also true of other desirable coating systems, this PLD technology could become an extremely attractive industrial tool for high value added coatings.

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9 p.

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OSTI as DE96002740

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  • Photonics technology transfer conference, Washington, DC (United States), 9 Nov 1994

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  • Other: DE96002740
  • Report No.: UCRL-JC--117087
  • Report No.: CONF-9411239--2
  • Grant Number: W-7405-ENG-48
  • DOI: 10.2172/125098 | External Link
  • Office of Scientific & Technical Information Report Number: 147727
  • Archival Resource Key: ark:/67531/metadc623934

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Office of Scientific & Technical Information Technical Reports

Reports, articles and other documents harvested from the Office of Scientific and Technical Information.

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  • September 15, 1994

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  • June 16, 2015, 7:43 a.m.

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  • Feb. 16, 2016, 7:35 p.m.

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McLean, W. II; Fehring, E.J.; Dragon, E.P. & Warner, B.E. High rate PLD of diamond-like-carbon utilizing high repetition rate visible lasers, article, September 15, 1994; California. (digital.library.unt.edu/ark:/67531/metadc623934/: accessed December 12, 2017), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.