Enhanced surface hardness in nitrogen-implanted silicon carbide

PDF Version Also Available for Download.

Description

Preliminary studies have been performed on the feasibility of carbon-silicon nitride formation ({beta}-Si{sub 1.5}C{sub 1.5}N{sub 4}, the homologue of equilibrium {beta}-Si{sub 3}N{sub 4} or hypothetical {beta}-C{sub 3}N{sub 4}) by high dose N{sup +}-implantation into polycrystalline {beta}-SiC (cubic). Thin films were formed using 100 keV implantations with varying ion doses in the range from 1.1 x 10{sup 17} to 27.1 x 10{sup 17} N/cm{sup 2}, and target temperatures between -196{degrees}C and 980{degrees}C. X-ray diffraction with a position-sensitive detector and cross-sectional transmission electron microscopy revealed that the as-implanted surfaces (up to 860{degrees}C) contained {approximately}0.1 {mu}m thick buried amorphous layers. Rutherford backscattering spectroscopy ... continued below

Physical Description

17 p.

Creation Information

Uslu, C.; Lee, D.H. & Berta, Y. June 1, 1995.

Context

This article is part of the collection entitled: Office of Scientific & Technical Information Technical Reports and was provided by UNT Libraries Government Documents Department to Digital Library, a digital repository hosted by the UNT Libraries. More information about this article can be viewed below.

Who

People and organizations associated with either the creation of this article or its content.

Authors

Publisher

Provided By

UNT Libraries Government Documents Department

Serving as both a federal and a state depository library, the UNT Libraries Government Documents Department maintains millions of items in a variety of formats. The department is a member of the FDLP Content Partnerships Program and an Affiliated Archive of the National Archives.

Contact Us

What

Descriptive information to help identify this article. Follow the links below to find similar items on the Digital Library.

Description

Preliminary studies have been performed on the feasibility of carbon-silicon nitride formation ({beta}-Si{sub 1.5}C{sub 1.5}N{sub 4}, the homologue of equilibrium {beta}-Si{sub 3}N{sub 4} or hypothetical {beta}-C{sub 3}N{sub 4}) by high dose N{sup +}-implantation into polycrystalline {beta}-SiC (cubic). Thin films were formed using 100 keV implantations with varying ion doses in the range from 1.1 x 10{sup 17} to 27.1 x 10{sup 17} N/cm{sup 2}, and target temperatures between -196{degrees}C and 980{degrees}C. X-ray diffraction with a position-sensitive detector and cross-sectional transmission electron microscopy revealed that the as-implanted surfaces (up to 860{degrees}C) contained {approximately}0.1 {mu}m thick buried amorphous layers. Rutherford backscattering spectroscopy showed that the peak concentration of nitrogen saturated up to approximately 54 at. % with increasing doses, suggesting formation of a new phase. Implantation to doses of 1.1 x 10{sup 17} and 2.3 x 10{sup 17} N/cm{sup 2} at 980{degrees}C caused enhanced surface hardness compared to SiC.

Physical Description

17 p.

Notes

OSTI as DE95017446

Source

  • International conference on ion beam analysis, Tempe, AZ (United States), 22-26 May 1995

Language

Item Type

Identifier

Unique identifying numbers for this article in the Digital Library or other systems.

  • Other: DE95017446
  • Report No.: CONF-9505122--7
  • Grant Number: AC05-84OR21400
  • Office of Scientific & Technical Information Report Number: 110722
  • Archival Resource Key: ark:/67531/metadc623586

Collections

This article is part of the following collection of related materials.

Office of Scientific & Technical Information Technical Reports

Reports, articles and other documents harvested from the Office of Scientific and Technical Information.

Office of Scientific and Technical Information (OSTI) is the Department of Energy (DOE) office that collects, preserves, and disseminates DOE-sponsored research and development (R&D) results that are the outcomes of R&D projects or other funded activities at DOE labs and facilities nationwide and grantees at universities and other institutions.

What responsibilities do I have when using this article?

When

Dates and time periods associated with this article.

Creation Date

  • June 1, 1995

Added to The UNT Digital Library

  • June 16, 2015, 7:43 a.m.

Description Last Updated

  • June 27, 2016, 12:46 p.m.

Usage Statistics

When was this article last used?

Yesterday: 0
Past 30 days: 0
Total Uses: 3

Interact With This Article

Here are some suggestions for what to do next.

Start Reading

PDF Version Also Available for Download.

International Image Interoperability Framework

IIF Logo

We support the IIIF Presentation API

Uslu, C.; Lee, D.H. & Berta, Y. Enhanced surface hardness in nitrogen-implanted silicon carbide, article, June 1, 1995; Tennessee. (digital.library.unt.edu/ark:/67531/metadc623586/: accessed October 22, 2018), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.