Finite Element Modeling of Micromachined MEMS Photon Devices

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The technology of microelectronics that has evolved over the past half century is one of great power and sophistication and can now be extended to many applications (MEMS and MOEMS) other than electronics. An interesting application of MEMS quantum devices is the detection of electromagnetic radiation. The operation principle of MEMS quantum devices is based on the photoinduced stress in semiconductors, and the photon detection results from the measurement of the photoinduced bending. These devices can be described as micromechanical photon detectors. In this work, we have developed a technique for simulating electronic stresses using finite element analysis. We have ... continued below

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Datskos, P.G.; Evans, B.M. & Schonberger, D. September 20, 1999.

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The technology of microelectronics that has evolved over the past half century is one of great power and sophistication and can now be extended to many applications (MEMS and MOEMS) other than electronics. An interesting application of MEMS quantum devices is the detection of electromagnetic radiation. The operation principle of MEMS quantum devices is based on the photoinduced stress in semiconductors, and the photon detection results from the measurement of the photoinduced bending. These devices can be described as micromechanical photon detectors. In this work, we have developed a technique for simulating electronic stresses using finite element analysis. We have used our technique to model the response of micromechanical photon devices to external stimuli and compared these results with experimental data. Material properties, geometry, and bimaterial design play an important role in the performance of micromechanical photon detectors. We have modeled these effects using finite element analysis and included the effects of bimaterial thickness coating, effective length of the device, width, and thickness.

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INIS; OSTI as DE00014361

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  • Miniaturized Systems with Microoptics and MEMS, Santa Clara, CA (US), 09/20/1999--09/22/1999

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  • Report No.: ORNL/CP-104106
  • Office of Scientific & Technical Information Report Number: 14361
  • Archival Resource Key: ark:/67531/metadc623174

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  • September 20, 1999

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  • June 16, 2015, 7:43 a.m.

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  • April 8, 2016, 7:21 p.m.

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Datskos, P.G.; Evans, B.M. & Schonberger, D. Finite Element Modeling of Micromachined MEMS Photon Devices, article, September 20, 1999; (digital.library.unt.edu/ark:/67531/metadc623174/: accessed October 18, 2017), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.