Surface micromachined sensors and actuators

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Description

A description of a three-level mechanical polysilicon surface-micromachining technology including a discussion of the advantages of this level of process complexity is presented. This technology is capable of forming mechanical elements ranging from simple cantilevered beams to complex, interconnected, interactive, microactuated micromechanisms. The inclusion of a third deposited layer of mechanical polysilicon greatly extends the degree of complexity available for micromechanism design. Additional features of the Sandia three-level process include the use of Chemical-Mechanical Polishing (CMP) for planarization, and the integration of micromechanics with the Sandia CMOS circuit process. The latter effort includes a CMOS-first, tungsten metallization process to allow ... continued below

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10 p.

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Sniegowski, J.J. August 1, 1995.

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This article is part of the collection entitled: Office of Scientific & Technical Information Technical Reports and was provided by UNT Libraries Government Documents Department to Digital Library, a digital repository hosted by the UNT Libraries. It has been viewed 152 times , with 4 in the last month . More information about this article can be viewed below.

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  • Sandia National Laboratories
    Publisher Info: Sandia National Labs., Albuquerque, NM (United States)
    Place of Publication: Albuquerque, New Mexico

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Description

A description of a three-level mechanical polysilicon surface-micromachining technology including a discussion of the advantages of this level of process complexity is presented. This technology is capable of forming mechanical elements ranging from simple cantilevered beams to complex, interconnected, interactive, microactuated micromechanisms. The inclusion of a third deposited layer of mechanical polysilicon greatly extends the degree of complexity available for micromechanism design. Additional features of the Sandia three-level process include the use of Chemical-Mechanical Polishing (CMP) for planarization, and the integration of micromechanics with the Sandia CMOS circuit process. The latter effort includes a CMOS-first, tungsten metallization process to allow the CMOS electronics to withstand high-temperature micromechanical processing. Alternatively, a novel micromechanics-first approach wherein the micromechanical devices are processed first in a well below the surface of the CMOS starting material followed by the standard, aluminum metallization CMOS process is also being pursued. Following the description of the polysilicon surface micromachining are examples of the major sensor and actuator projects based on this technology at the Microelectronics Development Laboratory (MDL) at Sandia National Laboratories. Efforts at the MDL are concentrated in the technology of surface micromachining due to the availability of and compatibility with standard CMOS processes. The primary sensors discussed are a silicon nitride membrane pressure sensor, hot polysilicon filaments for calorimetric gas sensing, and a smart hydrogen sensor. Examples of actuation mechanisms coupled to external devices are also presented. These actuators utilize the three-level process (plus an additional passive level) and employ either surface tension or electrostatic forces.

Physical Description

10 p.

Notes

OSTI as DE95016733

Source

  • Micro-integrated smart materials and structures conference (MISMSC), Williamsburg, VA (United States), 11-12 Oct 1995

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  • Other: DE95016733
  • Report No.: SAND--95-1892C
  • Report No.: CONF-9510204--1
  • Grant Number: AC04-94AL85000
  • Office of Scientific & Technical Information Report Number: 105673
  • Archival Resource Key: ark:/67531/metadc622800

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Office of Scientific & Technical Information Technical Reports

Reports, articles and other documents harvested from the Office of Scientific and Technical Information.

Office of Scientific and Technical Information (OSTI) is the Department of Energy (DOE) office that collects, preserves, and disseminates DOE-sponsored research and development (R&D) results that are the outcomes of R&D projects or other funded activities at DOE labs and facilities nationwide and grantees at universities and other institutions.

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  • August 1, 1995

Added to The UNT Digital Library

  • June 16, 2015, 7:43 a.m.

Description Last Updated

  • April 14, 2016, 1:17 p.m.

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Sniegowski, J.J. Surface micromachined sensors and actuators, article, August 1, 1995; Albuquerque, New Mexico. (digital.library.unt.edu/ark:/67531/metadc622800/: accessed November 22, 2017), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.