A study of light point defect removal by SC-1 chemistries

PDF Version Also Available for Download.

Description

Recent research has shown that dilute SC-1 chemistries, when combined with high frequency sonication (megasonics) can be highly effective for particle removal. The mechanism by which the SC-1 chemistry facilitates particle removal remains unclear. Experiments were performed under extremely dilute conditions in order to help elucidate a cleaning mechanism. Results indicate that hydrogen peroxide, under extremely dilute conditions, is not necessary for effective particle removal. The increase in haze commonly attributed to increased surface roughness is not observed when sufficiently dilute ammonium hydroxide (e.g., 1:2700) is used. The role of hydrogen peroxide, when more concentrated chemistries are used, may be ... continued below

Physical Description

10 p.

Creation Information

Resnick, P.J.; Adkins, C.L.J.; Matlock, C.A.; Kelly, M.J.; Clews, P.J. & Korbe, N.C. November 1, 1995.

Context

This report is part of the collection entitled: Office of Scientific & Technical Information Technical Reports and was provided by UNT Libraries Government Documents Department to Digital Library, a digital repository hosted by the UNT Libraries. It has been viewed 44 times . More information about this report can be viewed below.

Who

People and organizations associated with either the creation of this report or its content.

Sponsor

Publisher

  • Sandia National Laboratories
    Publisher Info: Sandia National Labs., Albuquerque, NM (United States)
    Place of Publication: Albuquerque, New Mexico

Provided By

UNT Libraries Government Documents Department

Serving as both a federal and a state depository library, the UNT Libraries Government Documents Department maintains millions of items in a variety of formats. The department is a member of the FDLP Content Partnerships Program and an Affiliated Archive of the National Archives.

Contact Us

What

Descriptive information to help identify this report. Follow the links below to find similar items on the Digital Library.

Description

Recent research has shown that dilute SC-1 chemistries, when combined with high frequency sonication (megasonics) can be highly effective for particle removal. The mechanism by which the SC-1 chemistry facilitates particle removal remains unclear. Experiments were performed under extremely dilute conditions in order to help elucidate a cleaning mechanism. Results indicate that hydrogen peroxide, under extremely dilute conditions, is not necessary for effective particle removal. The increase in haze commonly attributed to increased surface roughness is not observed when sufficiently dilute ammonium hydroxide (e.g., 1:2700) is used. The role of hydrogen peroxide, when more concentrated chemistries are used, may be simply to mitigate surface etching and roughening, rather than to play an active role in particle removal.

Physical Description

10 p.

Notes

OSTI as DE96002077

Source

  • 188. meeting of the Electrochemical Society, Chicago, IL (United States), 8-13 Oct 1995

Language

Item Type

Identifier

Unique identifying numbers for this report in the Digital Library or other systems.

  • Other: DE96002077
  • Report No.: SAND--95-2380C
  • Report No.: CONF-951007--7
  • Grant Number: AC04-94AL85000
  • DOI: 10.2172/125006 | External Link
  • Office of Scientific & Technical Information Report Number: 125006
  • Archival Resource Key: ark:/67531/metadc622519

Collections

This report is part of the following collection of related materials.

Office of Scientific & Technical Information Technical Reports

Reports, articles and other documents harvested from the Office of Scientific and Technical Information.

Office of Scientific and Technical Information (OSTI) is the Department of Energy (DOE) office that collects, preserves, and disseminates DOE-sponsored research and development (R&D) results that are the outcomes of R&D projects or other funded activities at DOE labs and facilities nationwide and grantees at universities and other institutions.

What responsibilities do I have when using this report?

When

Dates and time periods associated with this report.

Creation Date

  • November 1, 1995

Added to The UNT Digital Library

  • June 16, 2015, 7:43 a.m.

Description Last Updated

  • April 14, 2016, 7:04 p.m.

Usage Statistics

When was this report last used?

Yesterday: 0
Past 30 days: 1
Total Uses: 44

Interact With This Report

Here are some suggestions for what to do next.

Start Reading

PDF Version Also Available for Download.

International Image Interoperability Framework

IIF Logo

We support the IIIF Presentation API

Resnick, P.J.; Adkins, C.L.J.; Matlock, C.A.; Kelly, M.J.; Clews, P.J. & Korbe, N.C. A study of light point defect removal by SC-1 chemistries, report, November 1, 1995; Albuquerque, New Mexico. (digital.library.unt.edu/ark:/67531/metadc622519/: accessed December 15, 2018), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.