The Effect of Excimer Laser Treatment on the Surface Roughness and Fracture Strength of Alumina Substrates

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The microelectronics industry requires alumina substrates with exceptionally smooth surfaces and few surface defects to allow successful deposition of metallic films for reliable electronic performance. Irradiation by a 248-nm wavelength excimer laser beam (KrF) at a fluence of 125 mJ/mm{sup 2} and at various angles of incidence is shown to significantly reduce the surface roughness of alumina substrates. However, irradiation also creates a fine particulate deposit of alumina that only partially adheres to the substrate and impedes deposition of metal films. Annealing in air between 1350 C and 1450 C was found to remove the particles by sintering. As-received material ... continued below

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22 pages

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Smoot, J. E. May 13, 1998.

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The microelectronics industry requires alumina substrates with exceptionally smooth surfaces and few surface defects to allow successful deposition of metallic films for reliable electronic performance. Irradiation by a 248-nm wavelength excimer laser beam (KrF) at a fluence of 125 mJ/mm{sup 2} and at various angles of incidence is shown to significantly reduce the surface roughness of alumina substrates. However, irradiation also creates a fine particulate deposit of alumina that only partially adheres to the substrate and impedes deposition of metal films. Annealing in air between 1350 C and 1450 C was found to remove the particles by sintering. As-received material showed surface roughness average (R{sub a}) mean values of 457 nm, which was reduced to 60 nm (mean) following irradiation and 71 nm (mean) following irradiation and annealing at 1350 C. Irradiation also produced a decrease in the number and severity of surface defects. The flexural strength and Weibull modulus were both increased by laser irradiation and thermal treatment. Flexural strength went from an as-received value of 450 MPa to 560 MPa following irradiation/sintering, measured at 10% probability of failure. The Weibull modulus was increased from the as-received value of about 9, to about 13 following irradiation/sintering. It was concluded that irradiation at an angle of incidence of 60{degree} from perpendicular was most effective in producing a low surface roughness.

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22 pages

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OSTI as DE00016594

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  • Other Information: Supercedes report DE98053086

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  • Other: DE98053086
  • Report No.: KCP--613-6070
  • Report No.: ON: DE98053086
  • Report No.: BR: DP
  • Grant Number: AC04-76DP00613
  • DOI: 10.2172/16594 | External Link
  • Office of Scientific & Technical Information Report Number: 16594
  • Archival Resource Key: ark:/67531/metadc622293

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Office of Scientific & Technical Information Technical Reports

Reports, articles and other documents harvested from the Office of Scientific and Technical Information.

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Creation Date

  • May 13, 1998

Added to The UNT Digital Library

  • June 16, 2015, 7:43 a.m.

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  • March 29, 2016, 4:40 p.m.

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Smoot, J. E. The Effect of Excimer Laser Treatment on the Surface Roughness and Fracture Strength of Alumina Substrates, report, May 13, 1998; United States. (digital.library.unt.edu/ark:/67531/metadc622293/: accessed September 23, 2018), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.