The Chemical Exhaust Hazards of Dichlorosilane Deposits Determined with FT-ICR Mass Spectrometry

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Description

Flammable deposits have been analyzed from the exhaust systems of tools employing dichlorosilane (DCS) as a processing gas. Exact mass determinations with a high-resolution Fourier-transform ion-cyclotron resonance (FT-ICR) mass spectrometer allowed the identification of various polysiloxane species present in such an exhaust flow. Ion-molecule reactions indicate the preferred reaction pathway of siloxane formation is through HCl loss, leading to the highly reactive polysiloxane that was detected in the flammable deposits.

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12 p.

Creation Information

JAREK, RUSSELL L. & THORNBERG, STEVEN M. October 1, 1999.

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This article is part of the collection entitled: Office of Scientific & Technical Information Technical Reports and was provided by UNT Libraries Government Documents Department to Digital Library, a digital repository hosted by the UNT Libraries. It has been viewed 22 times . More information about this article can be viewed below.

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  • Sandia National Laboratories
    Publisher Info: Sandia National Labs., Albuquerque, NM, and Livermore, CA (United States)
    Place of Publication: Albuquerque, New Mexico

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Description

Flammable deposits have been analyzed from the exhaust systems of tools employing dichlorosilane (DCS) as a processing gas. Exact mass determinations with a high-resolution Fourier-transform ion-cyclotron resonance (FT-ICR) mass spectrometer allowed the identification of various polysiloxane species present in such an exhaust flow. Ion-molecule reactions indicate the preferred reaction pathway of siloxane formation is through HCl loss, leading to the highly reactive polysiloxane that was detected in the flammable deposits.

Physical Description

12 p.

Notes

OSTI as DE00012690

Medium: P; Size: 12 pages

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  • Journal Name: IEEE Transactions on Semiconductor Manufacturing; Other Information: Submitted to IEEE Transactions on Semiconductor Manufacturing

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  • Report No.: SAND99-2563J
  • Grant Number: AC04-94AL85000
  • Office of Scientific & Technical Information Report Number: 12690
  • Archival Resource Key: ark:/67531/metadc621780

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Reports, articles and other documents harvested from the Office of Scientific and Technical Information.

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  • October 1, 1999

Added to The UNT Digital Library

  • June 16, 2015, 7:43 a.m.

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  • April 6, 2017, 7:56 p.m.

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JAREK, RUSSELL L. & THORNBERG, STEVEN M. The Chemical Exhaust Hazards of Dichlorosilane Deposits Determined with FT-ICR Mass Spectrometry, article, October 1, 1999; Albuquerque, New Mexico. (digital.library.unt.edu/ark:/67531/metadc621780/: accessed December 16, 2017), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.