A neural manufacturing a novel concept for processing modeling, monitoring and control

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Description

Semiconductor fabrication lines have become extremely costly, and achieving a good return from such a high capital investment requires efficient utilization of these expensive facilities. It is highly desirable to shorten processing development time, increase fabrication yield, enhance flexibility, improve quality, and minimize downtime. We propose that these ends can be achieved by applying recent advances in the areas of artificial neural networks, fuzzy logic, machine learning, and genetic algorithms. We use the term neural manufacturing to describe such applications. This paper describes our use of artificial neural networks to improve the monitoring and control of semiconductor process.

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9 p.

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Law, B.; Fu, C.Y. & Petrich, L. October 1, 1995.

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Description

Semiconductor fabrication lines have become extremely costly, and achieving a good return from such a high capital investment requires efficient utilization of these expensive facilities. It is highly desirable to shorten processing development time, increase fabrication yield, enhance flexibility, improve quality, and minimize downtime. We propose that these ends can be achieved by applying recent advances in the areas of artificial neural networks, fuzzy logic, machine learning, and genetic algorithms. We use the term neural manufacturing to describe such applications. This paper describes our use of artificial neural networks to improve the monitoring and control of semiconductor process.

Physical Description

9 p.

Notes

OSTI as DE96002573

Source

  • International conference and exhibit of the Instrument Society of America: measurement, control, and automation, Houston, TX (United States), 22-27 Oct 1995

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  • Other: DE96002573
  • Report No.: UCRL-JC--121676
  • Report No.: CONF-951043--1
  • Grant Number: W-7405-ENG-48
  • Office of Scientific & Technical Information Report Number: 135047
  • Archival Resource Key: ark:/67531/metadc620828

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Office of Scientific & Technical Information Technical Reports

Reports, articles and other documents harvested from the Office of Scientific and Technical Information.

Office of Scientific and Technical Information (OSTI) is the Department of Energy (DOE) office that collects, preserves, and disseminates DOE-sponsored research and development (R&D) results that are the outcomes of R&D projects or other funded activities at DOE labs and facilities nationwide and grantees at universities and other institutions.

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  • October 1, 1995

Added to The UNT Digital Library

  • June 16, 2015, 7:43 a.m.

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  • Feb. 17, 2016, 2:45 p.m.

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Law, B.; Fu, C.Y. & Petrich, L. A neural manufacturing a novel concept for processing modeling, monitoring and control, article, October 1, 1995; California. (digital.library.unt.edu/ark:/67531/metadc620828/: accessed November 18, 2017), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.