A novel ellipsometer design for the study of large thin films

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This paper describes a novel long-scanning reflection ellipsometer to characterize large thin films. The ellipsometer uses a frequency stabilized Zeeman-split He-Ne laser as the source. Two common-path left and right circularly polarized beams, with a slight frequency difference, work as the incident beams. Beat frequency signals are detected from the reflected beams on a sample, and the thin film properties are studied. An optical common-mode rejection technique is employed to minimize the effects of environmental conditions. Measurements are not sensitive to low frequency noise and ignore any electronic dc offset effects. The variations of the beam intensities of the source ... continued below

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10 p.

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Lin, Y.; Premuzic, E. & Lin, M. July 1, 1995.

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Description

This paper describes a novel long-scanning reflection ellipsometer to characterize large thin films. The ellipsometer uses a frequency stabilized Zeeman-split He-Ne laser as the source. Two common-path left and right circularly polarized beams, with a slight frequency difference, work as the incident beams. Beat frequency signals are detected from the reflected beams on a sample, and the thin film properties are studied. An optical common-mode rejection technique is employed to minimize the effects of environmental conditions. Measurements are not sensitive to low frequency noise and ignore any electronic dc offset effects. The variations of the beam intensities of the source do not affect the experimental results. The optical system is designed to be arranged on a long air-bearing slide with an autofocus system of 0.1 {mu}m resolution in the range of 25 mm. Measurements will covert the range from 3 {mu}m to 600 mm. Experimental results can be taken in the ordinary experimental conditions.

Physical Description

10 p.

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OSTI as DE95016020

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  • 40. annual meeting of the Society of Photo-Optical Instrumentation Engineers, San Diego, CA (United States), 9-14 Jul 1995

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  • Other: DE95016020
  • Report No.: BNL--61989
  • Report No.: CONF-950793--16
  • Grant Number: AC02-76CH00016
  • Office of Scientific & Technical Information Report Number: 105670
  • Archival Resource Key: ark:/67531/metadc620610

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Office of Scientific & Technical Information Technical Reports

Reports, articles and other documents harvested from the Office of Scientific and Technical Information.

Office of Scientific and Technical Information (OSTI) is the Department of Energy (DOE) office that collects, preserves, and disseminates DOE-sponsored research and development (R&D) results that are the outcomes of R&D projects or other funded activities at DOE labs and facilities nationwide and grantees at universities and other institutions.

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  • July 1, 1995

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  • June 16, 2015, 7:43 a.m.

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  • Dec. 3, 2015, 4:38 p.m.

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Lin, Y.; Premuzic, E. & Lin, M. A novel ellipsometer design for the study of large thin films, article, July 1, 1995; Upton, New York. (digital.library.unt.edu/ark:/67531/metadc620610/: accessed April 24, 2018), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.