Microsystem technology development at Sandia National Laboratories Metadata

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Title

  • Main Title Microsystem technology development at Sandia National Laboratories

Creator

  • Author: Smith, J.H.
    Creator Type: Personal

Contributor

  • Sponsor: United States. Department of Energy.
    Contributor Type: Organization
    Contributor Info: USDOE, Washington, DC (United States)

Publisher

  • Name: Sandia National Laboratories
    Place of Publication: Albuquerque, New Mexico
    Additional Info: Sandia National Labs., Albuquerque, NM (United States)

Date

  • Creation: 1995-11-01

Language

  • English

Description

  • Content Description: An overview of the major sensor and actuator projects using the micromachining capabilities of the Microelectronics Development Laboratory at Sandia National Laboratories is presented. Development efforts are underway for a variety of surface micromachined sensors and actuators. A technology that embeds micromechanical devices below the surface of the wafer prior to microelectronics fabrication has also been developed for integrating microelectronics with surface micromachined micromechanical devices.
  • Physical Description: 3 p.

Subject

  • STI Subject Categories: 36 Materials Science
  • Keyword: Microelectronics
  • Keyword: Machining
  • Keyword: Miniaturization
  • Keyword: Manufacturing
  • Keyword: Fabrication
  • Keyword: Actuators
  • STI Subject Categories: 42 Engineering Not Included In Other Categories

Source

  • Conference: Microsystem technologies in the USA and Canada, Duesseldorf (Germany), 30 Oct - 4 Nov 1995

Collection

  • Name: Office of Scientific & Technical Information Technical Reports
    Code: OSTI

Institution

  • Name: UNT Libraries Government Documents Department
    Code: UNTGD

Resource Type

  • Article

Format

  • Text

Identifier

  • Other: DE96001940
  • Report No.: SAND--95-2326C
  • Report No.: CONF-9510229--1
  • Grant Number: AC04-94AL85000
  • Office of Scientific & Technical Information Report Number: 123234
  • Archival Resource Key: ark:/67531/metadc620556

Note

  • Display Note: OSTI as DE96001940
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