Sputter roughening instability on the Ge(001) surface: Energy and flux dependence

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We have measured surface roughening kinetics during low energy Xe ion sputtering of Ge (001) surfaces. Results are interpreted in terms of an instability theory developed by Bradley and Harper. Although the calculated magnitude of the roughening rate does not agree with the measured value, the variation of the rate with ion flux and energy is on agreement with the theory.

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6 p.

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Chason, E.; Mayer, T.M. & Kellerman, B.K. December 31, 1995.

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  • Sandia National Laboratories
    Publisher Info: Sandia National Labs., Albuquerque, NM (United States)
    Place of Publication: Albuquerque, New Mexico

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Description

We have measured surface roughening kinetics during low energy Xe ion sputtering of Ge (001) surfaces. Results are interpreted in terms of an instability theory developed by Bradley and Harper. Although the calculated magnitude of the roughening rate does not agree with the measured value, the variation of the rate with ion flux and energy is on agreement with the theory.

Physical Description

6 p.

Notes

OSTI as DE96003650

Source

  • Fall meeting of the Materials Research Society (MRS), Boston, MA (United States), 27 Nov - 1 Dec 1995

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  • Other: DE96003650
  • Report No.: SAND--95-1454C
  • Report No.: CONF-951155--16
  • Grant Number: AC04-94AL85000
  • Office of Scientific & Technical Information Report Number: 164444
  • Archival Resource Key: ark:/67531/metadc620322

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  • December 31, 1995

Added to The UNT Digital Library

  • June 16, 2015, 7:43 a.m.

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  • April 14, 2016, 8:47 p.m.

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Chason, E.; Mayer, T.M. & Kellerman, B.K. Sputter roughening instability on the Ge(001) surface: Energy and flux dependence, article, December 31, 1995; Albuquerque, New Mexico. (digital.library.unt.edu/ark:/67531/metadc620322/: accessed September 19, 2017), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.