Silica aerogel: An intrinsically low dielectric constant material

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Silica aerogels are highly porous solids having unique morphologies in wavelength of visible which both the pores and particles have sizes less than the wavelength of visible light. This fine nanostructure modifies the normal transport mechanisms within aerogels and endows them with a variety of exceptional physical properties. For example, aerogels have the lowest measured thermal conductivity and dielectric constant for any solid material. The intrinsically low dielectric properties of silica aerogels are the direct result of the extremely high achievable porosities, which are controllable over a range from 75% to more than 99.8 %, and which result in measured ... continued below

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11 p.

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Hrubesh, L.W. April 1, 1995.

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Description

Silica aerogels are highly porous solids having unique morphologies in wavelength of visible which both the pores and particles have sizes less than the wavelength of visible light. This fine nanostructure modifies the normal transport mechanisms within aerogels and endows them with a variety of exceptional physical properties. For example, aerogels have the lowest measured thermal conductivity and dielectric constant for any solid material. The intrinsically low dielectric properties of silica aerogels are the direct result of the extremely high achievable porosities, which are controllable over a range from 75% to more than 99.8 %, and which result in measured dielectric constants from 2.0 to less than 1.01. This paper discusses the synthesis of silica aerogels, processing them as thin films, and characterizing their dielectric properties. Existing data and other physical characteristics of bulk aerogels (e.g., thermal stablity, thermal expansion, moisture adsorption, modulus, dielectric strength, etc.), which are useful for evaluating them as potential dielectrics for microelectronics, are also given.

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11 p.

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OSTI as DE96002644

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  • Spring meeting of the Materials Research Society (MRS), San Francisco, CA (United States), 17-21 Apr 1995

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  • Other: DE96002644
  • Report No.: UCRL-JC--119228
  • Report No.: CONF-950412--59
  • Grant Number: W-7405-ENG-48
  • Office of Scientific & Technical Information Report Number: 147726
  • Archival Resource Key: ark:/67531/metadc619958

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  • April 1, 1995

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  • June 16, 2015, 7:43 a.m.

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  • Feb. 23, 2016, 3:34 p.m.

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Hrubesh, L.W. Silica aerogel: An intrinsically low dielectric constant material, article, April 1, 1995; California. (digital.library.unt.edu/ark:/67531/metadc619958/: accessed October 18, 2018), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.