Deep x-ray lithography fabrication of mm Wave cavities at the Advanced Photon Source.

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Millimeter-wave (mmWave) accelerating cavity structures have been manufactured using the deep x-ray lithography (DXRL) technique. These cavity structures have potential applications as parts of linear accelerators, microwave undulatory, and mm-wave amplifiers. The microfabrication process includes manufacturing of precision x-ray masks, exposure of positive resist by x-rays through the mask, resist development, and electroforming of the final microstructure. Prototypes of a 32-cell, 108-GHz constant-impedance cavity and a 66-cell, 94-GHz constant-gradient cavity were fabricated at APS. Using an HP8510C 26-GHz vector network analyzer, rf measurements are being prepared with a frequency up- and down-converter before and after a test cavity structure. Preliminary ... continued below

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5 p.

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Song, J. J. September 11, 1998.

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Description

Millimeter-wave (mmWave) accelerating cavity structures have been manufactured using the deep x-ray lithography (DXRL) technique. These cavity structures have potential applications as parts of linear accelerators, microwave undulatory, and mm-wave amplifiers. The microfabrication process includes manufacturing of precision x-ray masks, exposure of positive resist by x-rays through the mask, resist development, and electroforming of the final microstructure. Prototypes of a 32-cell, 108-GHz constant-impedance cavity and a 66-cell, 94-GHz constant-gradient cavity were fabricated at APS. Using an HP8510C 26-GHz vector network analyzer, rf measurements are being prepared with a frequency up- and down-converter before and after a test cavity structure. Preliminary design parameters for a 91-GHz multi-module klystron along with an overview of the DXRL technology are also discussed.

Physical Description

5 p.

Notes

INIS; OSTI as DE00010960

Medium: P; Size: 5 pages

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  • 19th International Linac Accelerator Conference (Linac '98), Chicago, IL (US), 08/23/1998--08/28/1998

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  • Report No.: ANL/ASD/CP-97263
  • Grant Number: W-31109-ENG-38
  • Office of Scientific & Technical Information Report Number: 10960
  • Archival Resource Key: ark:/67531/metadc619756

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Office of Scientific & Technical Information Technical Reports

Reports, articles and other documents harvested from the Office of Scientific and Technical Information.

Office of Scientific and Technical Information (OSTI) is the Department of Energy (DOE) office that collects, preserves, and disseminates DOE-sponsored research and development (R&D) results that are the outcomes of R&D projects or other funded activities at DOE labs and facilities nationwide and grantees at universities and other institutions.

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  • September 11, 1998

Added to The UNT Digital Library

  • June 16, 2015, 7:43 a.m.

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  • April 11, 2017, 12:17 p.m.

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Song, J. J. Deep x-ray lithography fabrication of mm Wave cavities at the Advanced Photon Source., article, September 11, 1998; Illinois. (digital.library.unt.edu/ark:/67531/metadc619756/: accessed December 10, 2017), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.