Model for designing planar magnetron cathodes Page: 1 of 27
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UCRL-ID-127644 Rev 1
A Model for Designing Planar Magnetron Cathodes
M. Garcia
May 30, 1997
totiThis is an informal report intended primarily for internal or limited external
distribution. The opinions and conclusions stated are those of the author and may
or may not be those of the Laboratory.
Work performed under the auspices of the U.S. Department of Energy by the
Lawrence Livermore National Laboratory under Contract W-7405-Eng-48.A
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Garcia, M. Model for designing planar magnetron cathodes, report, May 30, 1997; Livermore, California. (https://digital.library.unt.edu/ark:/67531/metadc619681/m1/1/: accessed April 24, 2024), University of North Texas Libraries, UNT Digital Library, https://digital.library.unt.edu; crediting UNT Libraries Government Documents Department.