High rate PLD of diamond-like-carbon utilizing copper vapor lasers

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Description

Thin film formation by pulsed laser deposition (PLD) has been routinely demonstrated at the laboratory scale for many elements and compounds. In order for processes based on PLD to progress from bench top experiments to commercialization, a number of key issues must be resolved. The principal limitations of current PLD technology are low deposition rate, inclusion of macro particles in the film that are ejected from the target, and difficulty in producing uniform coatings over large areas. Only thin films of very high value are considered economic at present deposition rates, of order 10 {micro}m-cm{sup 2}/h. Recently, a significant increase ... continued below

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10 p.

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McLean, W. II; Fehring, E.; Dragon, E. & Warner, B. August 15, 1994.

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Description

Thin film formation by pulsed laser deposition (PLD) has been routinely demonstrated at the laboratory scale for many elements and compounds. In order for processes based on PLD to progress from bench top experiments to commercialization, a number of key issues must be resolved. The principal limitations of current PLD technology are low deposition rate, inclusion of macro particles in the film that are ejected from the target, and difficulty in producing uniform coatings over large areas. Only thin films of very high value are considered economic at present deposition rates, of order 10 {micro}m-cm{sup 2}/h. Recently, a significant increase in PLD rate has been achieved in the laboratory, over 2,000 {micro} {center_dot} cm{sup 2}/h. These rates were accompanied by good surface characteristics by utilizing a copper vapor laser, operating at 100 W to 200 W average power and 4.3 kHz pulse repetition rate. The initial system demonstrations were performed by depositing high quality diamond-like-carbon (DLC) films with a remarkably low level of macro particle inclusions. The experiments and material characterizations performed on the deposited material are reviewed here.

Physical Description

10 p.

Notes

OSTI as DE96004018

Source

  • Applications of lasers and electro-optics, Orlando, FL (United States), 17-20 Oct 1994

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  • Other: DE96004018
  • Report No.: UCRL-JC--117086
  • Report No.: CONF-9410189--8
  • Grant Number: W-7405-ENG-48
  • DOI: 10.2172/125098 | External Link
  • Office of Scientific & Technical Information Report Number: 125098
  • Archival Resource Key: ark:/67531/metadc619675

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Office of Scientific & Technical Information Technical Reports

Reports, articles and other documents harvested from the Office of Scientific and Technical Information.

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  • August 15, 1994

Added to The UNT Digital Library

  • June 16, 2015, 7:43 a.m.

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  • Feb. 16, 2016, 7:35 p.m.

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McLean, W. II; Fehring, E.; Dragon, E. & Warner, B. High rate PLD of diamond-like-carbon utilizing copper vapor lasers, report, August 15, 1994; California. (digital.library.unt.edu/ark:/67531/metadc619675/: accessed June 22, 2018), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.