Measurement and calculation of PZT thin film longitudinal piezoelectric coefficients.

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The ferroelectric and piezoelectric properties of 2000 {angstrom} thick chemical solution deposited Pb(Zr{sub x}Ti{sub 1{minus}x})O{sub 3} (PZT) thin films were investigated. Several Zr/Ti ratios were studied: 30/70, 50/50 and 65/35, which correspond to tetragonal, near-morphotropic, and rhombohedral symmetries. In all samples, a {l_brace}111{r_brace}-texture is predominant. Longitudinal piezoelectric coefficients and their dc field dependence were measured using the contact AFM method. The expected trend of a maximum piezoelectric coefficient at or near to the MPB was not observed. The composition dependence was small, with the maximum d{sub 33} occurring in the tetragonal material. To explain the results, crystallographic texture and film ... continued below

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10 p.

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Christman, J. A.; Kim, S.-H.; Kingon, A. I.; Maiwa, H.; Maria, J.-P. & Streiffer, S. K. April 26, 1999.

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The ferroelectric and piezoelectric properties of 2000 {angstrom} thick chemical solution deposited Pb(Zr{sub x}Ti{sub 1{minus}x})O{sub 3} (PZT) thin films were investigated. Several Zr/Ti ratios were studied: 30/70, 50/50 and 65/35, which correspond to tetragonal, near-morphotropic, and rhombohedral symmetries. In all samples, a {l_brace}111{r_brace}-texture is predominant. Longitudinal piezoelectric coefficients and their dc field dependence were measured using the contact AFM method. The expected trend of a maximum piezoelectric coefficient at or near to the MPB was not observed. The composition dependence was small, with the maximum d{sub 33} occurring in the tetragonal material. To explain the results, crystallographic texture and film thickness effects are suggested. Using a modified phenomenological approach, derived electrostrictive coefficients, and experimental data, d{sub 33} values were calculated. Qualitative agreement was observed between the measured and calculated coefficients. Justifications of modifications to the calculations are discussed.

Physical Description

10 p.

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OSTI as DE00011777

Medium: P; Size: 10 pages

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  • 11th Annual International Symposium on Integrated Ferroelectrics Meeting, Colorado Springs, CO (US), 03/07/1999--03/10/1999

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  • Report No.: ANL/MSD/CP-98896
  • Grant Number: W-31109-ENG-38
  • Office of Scientific & Technical Information Report Number: 11777
  • Archival Resource Key: ark:/67531/metadc618765

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  • April 26, 1999

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  • June 16, 2015, 7:43 a.m.

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  • April 6, 2017, 6:59 p.m.

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Christman, J. A.; Kim, S.-H.; Kingon, A. I.; Maiwa, H.; Maria, J.-P. & Streiffer, S. K. Measurement and calculation of PZT thin film longitudinal piezoelectric coefficients., article, April 26, 1999; Illinois. (digital.library.unt.edu/ark:/67531/metadc618765/: accessed October 20, 2017), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.