X-ray reflectivity study of formation of multilayer porous anodic oxides of silicon.

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The paper reports data on the kinetics of anodic oxide films growth on silicon in aqueous solutions of phosphoric acids as well as a study of the morphology of the oxides grown in a special regime of the oscillating anodic potential. X-ray reflectivity measurements were performed on the samples of anodic oxides using an intense synchrotron radiation source. They have a multilayer structure as revealed by theoretical fitting of the reflectivity data. The oscillations of the anodic potential are explained in terms of synchronized oxidation/dissolution reactions at the silicon surface and accumulation of mechanic stress in the oxide film.

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9 p.

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Chu, Y.; Fenollosa, R.; Parkhutik, V. & You, H. July 21, 1999.

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Description

The paper reports data on the kinetics of anodic oxide films growth on silicon in aqueous solutions of phosphoric acids as well as a study of the morphology of the oxides grown in a special regime of the oscillating anodic potential. X-ray reflectivity measurements were performed on the samples of anodic oxides using an intense synchrotron radiation source. They have a multilayer structure as revealed by theoretical fitting of the reflectivity data. The oscillations of the anodic potential are explained in terms of synchronized oxidation/dissolution reactions at the silicon surface and accumulation of mechanic stress in the oxide film.

Physical Description

9 p.

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OSTI as DE00011831

Medium: P; Size: 9 pages

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  • European Materials Research Society 99, Strasbourg (FR), 06/01/1999--06/04/1999

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  • Report No.: ANL/MSD/CP-99136
  • Grant Number: W-31109-ENG-38
  • Office of Scientific & Technical Information Report Number: 11831
  • Archival Resource Key: ark:/67531/metadc618604

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Office of Scientific & Technical Information Technical Reports

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  • July 21, 1999

Added to The UNT Digital Library

  • June 16, 2015, 7:43 a.m.

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  • April 11, 2017, 8:11 p.m.

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Chu, Y.; Fenollosa, R.; Parkhutik, V. & You, H. X-ray reflectivity study of formation of multilayer porous anodic oxides of silicon., article, July 21, 1999; Illinois. (digital.library.unt.edu/ark:/67531/metadc618604/: accessed November 19, 2017), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.