Specular and diffuse x-ray scattering from tungsten/carbon multilayers having a high reflectivity at 10 keV.

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X-ray scattering measurements at 10 keV from multilayers having a period of 24.8 {angstrom} and consisting of 100 W/C bilayers are reported. Specular scans revealed first order reflectivities in the range 73.5% to 78.0% with bandpasses in the range of 1.5% to 1.7%. Total roughness (or interface grading) values deduced from fitting were in the range 2.5 to 3.0 for the last-to-grow surface of the W layers. Diffuse scattering measurements were made in a novel geometry that permitted investigation of in-plane momentum transfers up to 0.2 {angstrom}{sup {minus}1}. This is roughly an order of magnitude larger than is possible in ... continued below

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14 p.

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Macrander, A. September 10, 1998.

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X-ray scattering measurements at 10 keV from multilayers having a period of 24.8 {angstrom} and consisting of 100 W/C bilayers are reported. Specular scans revealed first order reflectivities in the range 73.5% to 78.0% with bandpasses in the range of 1.5% to 1.7%. Total roughness (or interface grading) values deduced from fitting were in the range 2.5 to 3.0 for the last-to-grow surface of the W layers. Diffuse scattering measurements were made in a novel geometry that permitted investigation of in-plane momentum transfers up to 0.2 {angstrom}{sup {minus}1}. This is roughly an order of magnitude larger than is possible in conventional rocking scans. A power law dependence of the diffuse scattering after integration over a ''Brillioun zone'' is found. The exponent of this power law, 1.75, when interpreted using a logarithmic correlation function leads to a value of 1.0 {angstrom} for the correlated roughness.

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14 p.

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OSTI as DE00010685

Medium: P; Size: 14 pages

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  • SPIE's 1998 Annual Meeting, San Diego, CA (US), 07/19/1998--07/24/1998

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  • Report No.: ANL/XFD/CP-95865
  • Grant Number: W-31109-ENG-38
  • Office of Scientific & Technical Information Report Number: 10685
  • Archival Resource Key: ark:/67531/metadc618515

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  • September 10, 1998

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  • June 16, 2015, 7:43 a.m.

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  • April 7, 2017, 2:42 p.m.

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Macrander, A. Specular and diffuse x-ray scattering from tungsten/carbon multilayers having a high reflectivity at 10 keV., article, September 10, 1998; Illinois. (digital.library.unt.edu/ark:/67531/metadc618515/: accessed November 17, 2017), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.