Deep x-ray lithography for micromechanics

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Extensions of the German LIGA process have brought about fabrication capability suitable for cost effective production of precision engineered components. The process attributes allow fabrication of mechanical components which are not capable of being made via conventional subtractive machining methods. Two process improvements have been responsible for this extended capability which involve the areas of thick photoresist application and planarization via precision lapping. Application of low-stress x-ray photoresist has been achieved using room temperature solvent bonding of a preformed photoresist sheet. Precision diamond lapping and polishing has provided a flexible process for the planarization of a wide variety of electroplated ... continued below

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[14] p. ; 28 cm.

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Christenson, T. R. & Guckel, H. August 1995.

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  • Christenson, T. R. Sandia National Labs., Albuquerque, NM (United States)
  • Guckel, H. Wisconsin Univ., Madison, WI (United States). Dept. of Electrical and Computer Engineering

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Description

Extensions of the German LIGA process have brought about fabrication capability suitable for cost effective production of precision engineered components. The process attributes allow fabrication of mechanical components which are not capable of being made via conventional subtractive machining methods. Two process improvements have been responsible for this extended capability which involve the areas of thick photoresist application and planarization via precision lapping. Application of low-stress x-ray photoresist has been achieved using room temperature solvent bonding of a preformed photoresist sheet. Precision diamond lapping and polishing has provided a flexible process for the planarization of a wide variety of electroplated metals in the presence of photoresist. Exposure results from the 2.5 GeV National Synchrotron Light Source storage ring at Brookhaven National Laboratory have shown that structural heights of several millimeter and above are possible. The process capabilities are also well suited for microactuator fabrication. Linear and rotational magnetic microactuators have been constructed which use coil winding technology with LIGA fabricated coil forms. Actuator output forces of 1 milliNewton have been obtained with power dissipation on the order of milliWatts. A rotational microdynamometer system which is capable of measuring torque-speed data is also discussed.

Physical Description

[14] p. ; 28 cm.

Source

  • Micromachining and microfabrication process technology conference, Austin, TX (United States), 23-24 Oct 1995

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  • Other: DE95016723
  • Report No.: SAND--95-1781C
  • Report No.: CONF-9510205--1
  • Office of Scientific & Technical Information Report Number: 100026
  • Archival Resource Key: ark:/67531/metadc613726

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Office of Scientific & Technical Information Technical Reports

Reports, articles and other documents harvested from the Office of Scientific and Technical Information.

Office of Scientific and Technical Information (OSTI) is the Department of Energy (DOE) office that collects, preserves, and disseminates DOE-sponsored research and development (R&D) results that are the outcomes of R&D projects or other funded activities at DOE labs and facilities nationwide and grantees at universities and other institutions.

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Creation Date

  • August 1995

Added to The UNT Digital Library

  • June 11, 2015, 9:57 p.m.

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  • April 11, 2016, 1:53 p.m.

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Christenson, T. R. & Guckel, H. Deep x-ray lithography for micromechanics, article, August 1995; Albuquerque, NM. (digital.library.unt.edu/ark:/67531/metadc613726/: accessed October 21, 2018), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.