Evaluation of hydrogen trapping in HfO2 high-κ dielectric thin films.
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Evaluation of hydrogen trapping in HfO2 high-κ dielectric thin films., thesis, August 2006; Denton, Texas. (https://digital.library.unt.edu/ark:/67531/metadc5596/: accessed March 19, 2024), University of North Texas Libraries, UNT Digital Library, https://digital.library.unt.edu; .