Topics in micro electromechanical systems: MEMS engineering and alternative materials for MEMS fabrication.

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This paper deals with various topics in micro electromechanical systems (MEMS) technology beginning with microactuation, MEMS processing, and MEMS design engineering. The fabrication and testing of three separate MEMS devices are described. The first two devices are a linear stepping motor and a continuous rotary motor, respectively; and were designed for the purpose of investigating the frictional and wear properties of silicon components. The third device is a bi-stable microrelay, in which electrical current conducts through a secondary circuit, via a novel probe-interconnect mechanism. The second half focuses on engineering a carbon nanotube / SU-8 photoepoxy nanocomposite for fabricating MEMS ... continued below

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Chapla, Kevin August 2004.

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  • Chapla, Kevin

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Description

This paper deals with various topics in micro electromechanical systems (MEMS) technology beginning with microactuation, MEMS processing, and MEMS design engineering. The fabrication and testing of three separate MEMS devices are described. The first two devices are a linear stepping motor and a continuous rotary motor, respectively; and were designed for the purpose of investigating the frictional and wear properties of silicon components. The third device is a bi-stable microrelay, in which electrical current conducts through a secondary circuit, via a novel probe-interconnect mechanism. The second half focuses on engineering a carbon nanotube / SU-8 photoepoxy nanocomposite for fabricating MEMS devices. A processing method for this material as well as the initial results of characterization, are discussed.

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UNT Student Graduate Works

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  • August 2004

Added to The UNT Digital Library

  • Feb. 15, 2008, 3:38 p.m.

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  • March 24, 2016, 4:46 p.m.

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Chapla, Kevin. Topics in micro electromechanical systems: MEMS engineering and alternative materials for MEMS fabrication., thesis, August 2004; Denton, Texas. (digital.library.unt.edu/ark:/67531/metadc4553/: accessed July 16, 2018), University of North Texas Libraries, Digital Library, digital.library.unt.edu; .