Fabrication of MOS capacitor and transitor structure using contact photolithography.

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Description

This problem in lieu of thesis report describes a practical photolithographic method to produce micro patterns on metal-oxide-semiconductor or metal-oxide-semiconductor-metal layers for electrical measurements. The desired patterns are then transferred from the photo mask to the photoresist-coated metal film by exposure, followed by wet etching. In the procedure described in this report, it was observed that microstructures as small as 27 mm with an edge roughness of ~ 2 mm can be reproducibly generated with this process. MOS capacitors and transistors structures can be fabricated by using this technique. The method described in this report requires access to only simple ... continued below

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Su, Danni August 2002.

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This thesis is part of the collection entitled: UNT Student Graduate Works and was provided by UNT Libraries to Digital Library, a digital repository hosted by the UNT Libraries. It has been viewed 843 times , with 5 in the last month . More information about this thesis can be viewed below.

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  • Su, Danni

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Description

This problem in lieu of thesis report describes a practical photolithographic method to produce micro patterns on metal-oxide-semiconductor or metal-oxide-semiconductor-metal layers for electrical measurements. The desired patterns are then transferred from the photo mask to the photoresist-coated metal film by exposure, followed by wet etching. In the procedure described in this report, it was observed that microstructures as small as 27 mm with an edge roughness of ~ 2 mm can be reproducibly generated with this process. MOS capacitors and transistors structures can be fabricated by using this technique. The method described in this report requires access to only simple facilities so that it is relatively inexpensive, and the overall time required for the whole process is short.

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UNT Student Graduate Works

This collection houses graduate student works other than theses and dissertations. All materials have been previously accepted by a professional organization or approved by a faculty mentor. The collection includes, but is not limited to problems in lieu of thesis, supplemental files associated with theses and dissertations, posters, recitals, presentations, articles, reviews, book chapters, and artwork. Some items in this collection are restricted to use by the UNT community.

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  • August 2002

Added to The UNT Digital Library

  • Sept. 26, 2007, 2:47 a.m.

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  • March 24, 2016, 4:13 p.m.

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Citations, Rights, Re-Use

Su, Danni. Fabrication of MOS capacitor and transitor structure using contact photolithography., thesis, August 2002; Denton, Texas. (digital.library.unt.edu/ark:/67531/metadc3172/: accessed October 18, 2017), University of North Texas Libraries, Digital Library, digital.library.unt.edu; .