Graphene Formation on Dielectrics and Electronic Devices Formed Therefrom

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Description

Patent relating to graphene formation on dielectrics and electronic devices formed therefrom.

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12 p. : ill.

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Kelber, Jeffry A.; Gaddam, Sneha Sen & Bjelkevig, Cameron L. April 1, 2014.

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This patent is part of the collection entitled: UNT Scholarly Works and was provided by the UNT College of Arts and Sciences to the UNT Digital Library, a digital repository hosted by the UNT Libraries. It has been viewed 173 times. More information about this patent can be viewed below.

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Description

Patent relating to graphene formation on dielectrics and electronic devices formed therefrom.

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12 p. : ill.

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Abstract: Methods of forming a graphene-based device are provided. According to an embodiment, a graphene-based device can be formed by subjecting a substrate having a dielectric formed thereon to a chemical vapor deposition (CVD) process using a cracked hydrocarbon or a physical vapor deposition (PVD) process using a graphite source; and performing an annealing process. The annealing process can be performed to temperatures of 1000 K or more. The cracked hydrocarbon of the CVD process can be cracked ethylene. In accordance with one embodiment, the application of the cracked ethylene to a MgO(111) surface followed by an annealing under ultra high vacuum conditions can result in a structure on the MgO(111) surface of an ordered graphene film with an oxidized carbon-containing interfacial layer therebetween. In another embodiment, the PVD process can be used to form single or multiple monolayers of graphene.

Prior Publication Data: US 2012/0168721 A1, July 5, 2012.

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  • December 29, 2010

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  • April 1, 2014

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  • April 1, 2014

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  • July 18, 2014, 11:30 a.m.

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  • Dec. 12, 2017, 8:19 p.m.

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Kelber, Jeffry A.; Gaddam, Sneha Sen & Bjelkevig, Cameron L. Graphene Formation on Dielectrics and Electronic Devices Formed Therefrom, patent, April 1, 2014; [Washington, D.C.]. (https://digital.library.unt.edu/ark:/67531/metadc307068/: accessed August 16, 2022), University of North Texas Libraries, UNT Digital Library, https://digital.library.unt.edu; crediting UNT College of Arts and Sciences.

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