Method of Making Integrated Circuits Using Ruthenium and its Oxides as a Cu Diffusion Barrier

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Description

Patent relating to a method of making integrated circuits using ruthenium and its oxides as a Cu diffusion barrier.

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9 p. : ill.

Creation Information

Chyan, Oliver M. R. & Ponnuswamy, Thomas July 24, 2007.

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This patent is part of the collection entitled: UNT Scholarly Works and was provided by UNT College of Arts and Sciences to Digital Library, a digital repository hosted by the UNT Libraries. It has been viewed 128 times , with 4 in the last month . More information about this patent can be viewed below.

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Description

Patent relating to a method of making integrated circuits using ruthenium and its oxides as a Cu diffusion barrier.

Physical Description

9 p. : ill.

Notes

Abstract: The present invention generally relates to methods used for fabricating integrated circuits (“ICs”), using Ruthenium (“Ru”) and its oxides and/or Iridium (“Ir”) and its oxides as the diffusion barrier to contain and control copper (“Cu”) interconnects. The invention also covers ICs incorporating such materials in the diffusion barrier to contain and control the Cu interconnects. The present invention advantageously provides better integration and fabrication of advanced IC chips with sub-micron features.

Prior Publication Data: US 2004/0051117 A1, March 18, 2004.

Related U.S. Application Data: Provisional application number 60/393,204, filed on July 2, 2002.

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UNT Scholarly Works

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Submitted Date

  • June 20, 2003

Accepted Date

  • July 24, 2007

Creation Date

  • July 24, 2007

Added to The UNT Digital Library

  • June 24, 2014, 1:10 p.m.

Description Last Updated

  • July 11, 2014, 3:50 p.m.

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Chyan, Oliver M. R. & Ponnuswamy, Thomas. Method of Making Integrated Circuits Using Ruthenium and its Oxides as a Cu Diffusion Barrier, patent, July 24, 2007; [Washington, D.C.]. (digital.library.unt.edu/ark:/67531/metadc304839/: accessed November 23, 2017), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT College of Arts and Sciences.