Method for Removing Contaminants on a Substrate

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Description

Patent relating to a method for removing contaminants on a substrate.

Physical Description

10 p. : ill.

Creation Information

Quevedo-Lopez, Manuel A.; Wallace, Robert M.; Bouanani, Mohamed El & Gnade, Bruce August 23, 2005.

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This patent is part of the collection entitled: UNT Scholarly Works and was provided by UNT College of Engineering to Digital Library, a digital repository hosted by the UNT Libraries. It has been viewed 86 times . More information about this patent can be viewed below.

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UNT College of Engineering

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Description

Patent relating to a method for removing contaminants on a substrate.

Physical Description

10 p. : ill.

Notes

Abstract: A method of processing a substrate is disclosed. The method includes depositing a dielectric layer having a metal oxide on a substrate. A portion of the dielectric layer is removed to form a dielectric structure, thereby exposing a surface of the substrate. For example, the dielectric layer may be patterned using standard photolithographic techniques and etching. An oxide layer is then formed on the exposed surface of the substrate. The oxide layer may be formed using ozone that is generated using ultraviolet radiation. After the oxide layer is formed, it is removed using an etching process.

Prior Publication Data: US 2004/0102009 A1, May 27, 2004.

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UNT Scholarly Works

Materials from the UNT community's research, creative, and scholarly activities and UNT's Open Access Repository. Access to some items in this collection may be restricted.

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Submitted Date

  • November 21, 2002

Accepted Date

  • August 23, 2005

Creation Date

  • August 23, 2005

Added to The UNT Digital Library

  • June 22, 2014, 9:07 p.m.

Description Last Updated

  • Dec. 12, 2017, 8:20 p.m.

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Quevedo-Lopez, Manuel A.; Wallace, Robert M.; Bouanani, Mohamed El & Gnade, Bruce. Method for Removing Contaminants on a Substrate, patent, August 23, 2005; [Washington, D.C.]. (digital.library.unt.edu/ark:/67531/metadc304743/: accessed October 20, 2018), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT College of Engineering.