Characterizaton of Triethoxyfluorosilane and Tetraethoxysilane Based Aerogels

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Aerogels are highly porous, low dielectric constant (low k) materials being considered by the semiconductor industry as an interlayer dielectric. Low k materials are needed to overcome capacitance problems that limit device feature sizes. Precursors triethoxyfluorosilane (TEFS) and tetraethoxysilane (TEOS) were used to prepare bulk aerogels. Samples were prepared by sol-gel methods, and then carbon dioxide supercritically-dried. Effects of varying the water to precursor ratio were studied with respect to aerogel properties and microstructure. Methods of analysis for this study include FTIR-ATR, TEM, RBS, EDS, SEM, dielectric constant determination by impedance and surface area by gas adsorption. Si-F bonds were ... continued below

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Roepsch, Jodi Ann December 2001.

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  • Roepsch, Jodi Ann

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Aerogels are highly porous, low dielectric constant (low k) materials being considered by the semiconductor industry as an interlayer dielectric. Low k materials are needed to overcome capacitance problems that limit device feature sizes. Precursors triethoxyfluorosilane (TEFS) and tetraethoxysilane (TEOS) were used to prepare bulk aerogels. Samples were prepared by sol-gel methods, and then carbon dioxide supercritically-dried. Effects of varying the water to precursor ratio were studied with respect to aerogel properties and microstructure. Methods of analysis for this study include FTIR-ATR, TEM, RBS, EDS, SEM, dielectric constant determination by impedance and surface area by gas adsorption. Si-F bonds were determined to be present in both acid- and base-catalyzed TEFS as well as HF-catalyzed TEOS. Fluorine promotes a fractal network microstructure as opposed to a particle-like microstructure. Surface area and dielectric constant were determined to increase slightly with increases in the water to precursor ratio.

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  • December 2001

Added to The UNT Digital Library

  • Sept. 25, 2007, 10:41 p.m.

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  • June 23, 2008, 1:43 p.m.

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Roepsch, Jodi Ann. Characterizaton of Triethoxyfluorosilane and Tetraethoxysilane Based Aerogels, thesis, December 2001; Denton, Texas. (digital.library.unt.edu/ark:/67531/metadc2999/: accessed May 24, 2017), University of North Texas Libraries, Digital Library, digital.library.unt.edu; .