Experimental and Analytical Study of the Sputtering Phenomena

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Description

An experimental apparatus was constructed to examine the heat-transfer characteristics of a sputtering front. In the present study, a heat source of sufficient intensity was located immediately below the sputtering front, which prevented its downward progress, thus permitting detailed measurements of steady-state surface temperatures throughout a sputtering front. A two-dimensional analytical model was developed to describe a stationary sputtering front where the wet-dry interface corresponds to a CHF phenomena and the dry zone is adiabatic. This model is nonlinear because of the temperature dependence of the heat-transfer coefficient in the wetted region and has yielded good agreement with data. A ... continued below

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100 p. : charts

Creation Information

Howard, Paul A. March 1976.

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  • Main Title: Experimental and Analytical Study of the Sputtering Phenomena
  • Added Title: ANL (Series)
  • Added Title: Argonne National Laboratory Report ANL-76-41
  • Series Title: Argonne National Laboratory Reports

Description

An experimental apparatus was constructed to examine the heat-transfer characteristics of a sputtering front. In the present study, a heat source of sufficient intensity was located immediately below the sputtering front, which prevented its downward progress, thus permitting detailed measurements of steady-state surface temperatures throughout a sputtering front. A two-dimensional analytical model was developed to describe a stationary sputtering front where the wet-dry interface corresponds to a CHF phenomena and the dry zone is adiabatic. This model is nonlinear because of the temperature dependence of the heat-transfer coefficient in the wetted region and has yielded good agreement with data. A simplified one-dimensional approximation was developed which adequately describes these data. Finally, by means of a coordinate transformation and additional simplifying assumptions, this analysis was extended to analyze moving sputtering fronts, and reasonably good agreement with reported data was shown.

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100 p. : charts

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Technical Report Archive and Image Library

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  • March 1976

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  • Aug. 4, 2015, 8:33 a.m.

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Howard, Paul A. Experimental and Analytical Study of the Sputtering Phenomena, report, March 1976; Argonne, Illinois. (https://digital.library.unt.edu/ark:/67531/metadc282686/: accessed April 24, 2019), University of North Texas Libraries, Digital Library, https://digital.library.unt.edu; crediting UNT Libraries Government Documents Department.