Stoichiometry and Deposition Temperature Dependence of the Microstructural and Electrical Properties of Barium Strontium Titanate Thin Films

Thumbnail image of item number 1 in: 'Stoichiometry and Deposition Temperature Dependence of the Microstructural and Electrical Properties of Barium Strontium Titanate Thin Films'.
Thumbnail image of item number 2 in: 'Stoichiometry and Deposition Temperature Dependence of the Microstructural and Electrical Properties of Barium Strontium Titanate Thin Films'.
Thumbnail image of item number 3 in: 'Stoichiometry and Deposition Temperature Dependence of the Microstructural and Electrical Properties of Barium Strontium Titanate Thin Films'.
Thumbnail image of item number 4 in: 'Stoichiometry and Deposition Temperature Dependence of the Microstructural and Electrical Properties of Barium Strontium Titanate Thin Films'.
Showing 1-4 of 98 pages in this thesis.

PDF Version Also Available for Download.

Description

Barium Strontium Titanate (BST) was deposited on Pt/ZrO2 / SiO2/Si substrates using liquid source metal organic chemical vapor deposition. A stoichiometry series was deposited with various GrII/Ti ratios (0.658 to 1.022) and a temperature series was deposited at 550 to 700°C. The thin films were characterized using transmission electron microscopy. Both series of samples contained cubic perovskite BST and an amorphous phase. The grain size increased and the volume fraction of amorphous phase decreased with increasing deposition temperature. The electrical and microstructural properties improved as the GrII/Ti ratio approached 1 and deteriorated beyond 1. This research demonstrates that BST thin ... continued below

Physical Description

ix, 89 leaves : ill.

Creation Information

Pena, Piedad May 1998.

Context

This thesis is part of the collection entitled: UNT Theses and Dissertations and was provided by UNT Libraries to Digital Library, a digital repository hosted by the UNT Libraries. It has been viewed 95 times . More information about this thesis can be viewed below.

Who

People and organizations associated with either the creation of this thesis or its content.

Author

Chair

Committee Member

Publisher

Rights Holder

For guidance see Citations, Rights, Re-Use.

  • Pena, Piedad

Provided By

UNT Libraries

The UNT Libraries serve the university and community by providing access to physical and online collections, fostering information literacy, supporting academic research, and much, much more.

About | Browse this Partner

Contact Us

Corrections Questions

What

Descriptive information to help identify this thesis. Follow the links below to find similar items on the Digital Library.

Degree Information

Description

Barium Strontium Titanate (BST) was deposited on Pt/ZrO2 / SiO2/Si substrates using liquid source metal organic chemical vapor deposition. A stoichiometry series was deposited with various GrII/Ti ratios (0.658 to 1.022) and a temperature series was deposited at 550 to 700°C. The thin films were characterized using transmission electron microscopy.
Both series of samples contained cubic perovskite BST and an amorphous phase. The grain size increased and the volume fraction of amorphous phase decreased with increasing deposition temperature. The electrical and microstructural properties improved as the GrII/Ti ratio approached 1 and deteriorated beyond 1. This research demonstrates that BST thin films are a strong candidate for future
MOS transistor gate insulator applications.

Physical Description

ix, 89 leaves : ill.

Language

Item Type

Identifier

Unique identifying numbers for this thesis in the Digital Library or other systems.

Collections

This thesis is part of the following collection of related materials.

UNT Theses and Dissertations

Theses and dissertations represent a wealth of scholarly and artistic content created by masters and doctoral students in the degree-seeking process. Some ETDs in this collection are restricted to use by the UNT community.

About | Browse this Collection

What responsibilities do I have when using this thesis?

Digital Files

When

Dates and time periods associated with this thesis.

Creation Date

  • May 1998

Added to The UNT Digital Library

  • March 26, 2014, 6:36 p.m.

Description Last Updated

  • Sept. 24, 2014, 8:43 a.m.

Usage Statistics

When was this thesis last used?

Yesterday: 0
Past 30 days: 1
Total Uses: 95
More Statistics

Interact With This Thesis

Here are some suggestions for what to do next.

Start Reading

Thumbnail image of item number 1 in: 'Stoichiometry and Deposition Temperature Dependence of the Microstructural and Electrical Properties of Barium Strontium Titanate Thin Films'.
Thumbnail image of item number 2 in: 'Stoichiometry and Deposition Temperature Dependence of the Microstructural and Electrical Properties of Barium Strontium Titanate Thin Films'.
Thumbnail image of item number 3 in: 'Stoichiometry and Deposition Temperature Dependence of the Microstructural and Electrical Properties of Barium Strontium Titanate Thin Films'.
Thumbnail image of item number 4 in: 'Stoichiometry and Deposition Temperature Dependence of the Microstructural and Electrical Properties of Barium Strontium Titanate Thin Films'.

PDF Version Also Available for Download.

Citations, Rights, Re-Use

International Image Interoperability Framework

IIF Logo

We support the IIIF Presentation API

Pena, Piedad. Stoichiometry and Deposition Temperature Dependence of the Microstructural and Electrical Properties of Barium Strontium Titanate Thin Films, thesis, May 1998; Denton, Texas. (digital.library.unt.edu/ark:/67531/metadc279410/: accessed November 18, 2018), University of North Texas Libraries, Digital Library, digital.library.unt.edu; .