(1) Gauge Calibrations with Different Gases. A Veeco RG-75 gauge was calibrated for hydrogen, helium, argon, and nitrogen; and for air of three different degrees humidity. Values of over-all averages, together with related derived quantities are summarized in Table 1. (2) Effect of Humidity of a Calibrating Gas. Whenever air is used in making gauge calibrations it is common practice to specify that the humidity for the air used should not exceed some arbitrary, low value. Under the conditions of the tests, (RG-75 gauges no refrigerated traps), changes in humidity of the calibrating gas have no detectable effect on the …
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Oak Ridge National Laboratory Report CF-61-5-109 (Suppl. 3)
Description
(1) Gauge Calibrations with Different Gases. A Veeco RG-75 gauge was calibrated for hydrogen, helium, argon, and nitrogen; and for air of three different degrees humidity. Values of over-all averages, together with related derived quantities are summarized in Table 1. (2) Effect of Humidity of a Calibrating Gas. Whenever air is used in making gauge calibrations it is common practice to specify that the humidity for the air used should not exceed some arbitrary, low value. Under the conditions of the tests, (RG-75 gauges no refrigerated traps), changes in humidity of the calibrating gas have no detectable effect on the sensitivity of the gauges, nor on measured pumping speed.
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