Cross sections for inelastic scattering of electrons by atoms: selected topics related to electron microscopy

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We begin with a resume of the Bethe theory, which provides a general framework for discussing the inelastic scattering of fast electrons and leads to powerful criteria for judging the reliability of cross-section data. The central notion of the theory is the generalized oscillator strength as a function of both the energy transfer and the momentum transfer, and is the only non-trivial factor in the inelastic-scattering cross section. Although the Bethe theory was initially conceived for free atoms, its basic ideas apply to solids, with suitable generalizations; in this respect, the notion of the dielectric response function is the most ... continued below

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Pages: 74

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Inokuti, M. & Manson, S.T. January 1, 1982.

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Description

We begin with a resume of the Bethe theory, which provides a general framework for discussing the inelastic scattering of fast electrons and leads to powerful criteria for judging the reliability of cross-section data. The central notion of the theory is the generalized oscillator strength as a function of both the energy transfer and the momentum transfer, and is the only non-trivial factor in the inelastic-scattering cross section. Although the Bethe theory was initially conceived for free atoms, its basic ideas apply to solids, with suitable generalizations; in this respect, the notion of the dielectric response function is the most fundamental. Topics selected for discussion include the generalized oscillator strengths for the K-shell and L-shell ionization for all atoms with Z less than or equal to 30, evaluated by use of the Hartree-Slater potential. As a function of the energy transfer, the generalized oscillator strength most often shows a non-monotonic structure near the K-shell and L-shell thresholds, which has been interpreted as manifestations of electron-wave propagation through atomic fields. For molecules and solids, there are additional structures due to the scattering of ejected electrons by the fields of other atoms.

Physical Description

Pages: 74

Notes

NTIS, PC A04/MF A01; 1.

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  • Conference on electron beam interactions and solids for microscopy, microanalysis and microlithography, Asilomar, CA, USA, 18 Apr 1982

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  • Other: DE83007185
  • Report No.: CONF-8204113-1
  • Grant Number: W-31-109-ENG-38
  • Office of Scientific & Technical Information Report Number: 6369744
  • Archival Resource Key: ark:/67531/metadc1209816

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  • January 1, 1982

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  • July 5, 2018, 11:11 p.m.

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  • Oct. 18, 2018, 4:50 p.m.

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Inokuti, M. & Manson, S.T. Cross sections for inelastic scattering of electrons by atoms: selected topics related to electron microscopy, article, January 1, 1982; United States. (digital.library.unt.edu/ark:/67531/metadc1209816/: accessed November 21, 2018), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.