rf plasma synthesis of ultrafine, ultrapure silicon carbide powder

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Ultrafine, ultrapure silicon carbide powder has been produced by reaction of silane and methane in a high temperature rf plasma. Preliminary studies include the effect of gas composition and of powder (plasma temperature) on the stoichiometry of the powder. The carbon-to-silicon ratio of the powder was varied from 1.0 to 1.9 by changing the process conditions. The powder has a BET surface area of 101 m/sup 2//g, which is equivalent to a particle diameter of 18.5 nm. A particle size in the range of 10 to 20 nm was measured by transmission electron microscopy. X-ray diffraction results indicate a domain ... continued below

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Pages: 18

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Hollabaugh, C.M.; Hull, D.E.; Newkirk, L.R. & Petrovic, J.J. January 1, 1983.

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Description

Ultrafine, ultrapure silicon carbide powder has been produced by reaction of silane and methane in a high temperature rf plasma. Preliminary studies include the effect of gas composition and of powder (plasma temperature) on the stoichiometry of the powder. The carbon-to-silicon ratio of the powder was varied from 1.0 to 1.9 by changing the process conditions. The powder has a BET surface area of 101 m/sup 2//g, which is equivalent to a particle diameter of 18.5 nm. A particle size in the range of 10 to 20 nm was measured by transmission electron microscopy. X-ray diffraction results indicate a domain size of 7.5 nm and a crystal structure of beta (cubic) silicon carbide. Spectrographic analysis shows that metallic impurities are lower than high quality grade commercial powder. Because of the high surface area, the powder must be stored and processed in an inert atmosphere to prevent severe contamination with oxygen.

Physical Description

Pages: 18

Notes

NTIS, PC A02/MF A01.

Source

  • International conference on ultrastructure processing of ceramics, glasses and composites, Gainesville, FL, USA, 14 Feb 1983

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  • Other: DE83007551
  • Report No.: LA-UR-83-367
  • Report No.: CONF-830215-2
  • Grant Number: W-7405-ENG-36
  • Office of Scientific & Technical Information Report Number: 6386757
  • Archival Resource Key: ark:/67531/metadc1209058

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Office of Scientific & Technical Information Technical Reports

Reports, articles and other documents harvested from the Office of Scientific and Technical Information.

Office of Scientific and Technical Information (OSTI) is the Department of Energy (DOE) office that collects, preserves, and disseminates DOE-sponsored research and development (R&D) results that are the outcomes of R&D projects or other funded activities at DOE labs and facilities nationwide and grantees at universities and other institutions.

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  • January 1, 1983

Added to The UNT Digital Library

  • July 5, 2018, 11:11 p.m.

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  • Oct. 25, 2018, 3:25 p.m.

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Hollabaugh, C.M.; Hull, D.E.; Newkirk, L.R. & Petrovic, J.J. rf plasma synthesis of ultrafine, ultrapure silicon carbide powder, article, January 1, 1983; United States. (digital.library.unt.edu/ark:/67531/metadc1209058/: accessed December 14, 2018), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.