Characterization of ceramic substrates. Final report. [Hybrid microelectronic circuits]

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Description

Characterization techniques were developed to improve receiving inspection and in-process testing of 99.5% alumina substrates used for manufacturing hybrid microcircuits. Many of these tests have been implemented into production; other tests have been recommended for further development. The tests developed were scanning electron microscope (SEM) measurement of grain size; low angle light inspection for surface defects; non-contact thickness and camber test; dye penetrant check for porosity and cracks; and SEM inspection of surface finish in holes. The effect of raindrop (variation of light transmission through substrates) and polished high spot defects was determined.

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Pages: 56

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Laudel, A. February 1, 1979.

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Description

Characterization techniques were developed to improve receiving inspection and in-process testing of 99.5% alumina substrates used for manufacturing hybrid microcircuits. Many of these tests have been implemented into production; other tests have been recommended for further development. The tests developed were scanning electron microscope (SEM) measurement of grain size; low angle light inspection for surface defects; non-contact thickness and camber test; dye penetrant check for porosity and cracks; and SEM inspection of surface finish in holes. The effect of raindrop (variation of light transmission through substrates) and polished high spot defects was determined.

Physical Description

Pages: 56

Notes

Dep. NTIS, PC A04/MF A01.

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  • Report No.: BDX-613-2057(Rev.)
  • Grant Number: EY-76-C-04-0613
  • DOI: 10.2172/6343298 | External Link
  • Office of Scientific & Technical Information Report Number: 6343298
  • Archival Resource Key: ark:/67531/metadc1207012

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Office of Scientific & Technical Information Technical Reports

Reports, articles and other documents harvested from the Office of Scientific and Technical Information.

Office of Scientific and Technical Information (OSTI) is the Department of Energy (DOE) office that collects, preserves, and disseminates DOE-sponsored research and development (R&D) results that are the outcomes of R&D projects or other funded activities at DOE labs and facilities nationwide and grantees at universities and other institutions.

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Creation Date

  • February 1, 1979

Added to The UNT Digital Library

  • July 5, 2018, 11:11 p.m.

Description Last Updated

  • Sept. 5, 2018, 2:20 p.m.

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Laudel, A. Characterization of ceramic substrates. Final report. [Hybrid microelectronic circuits], report, February 1, 1979; United States. (digital.library.unt.edu/ark:/67531/metadc1207012/: accessed December 10, 2018), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.