Thin-film thickness measurement using x-ray peak ratioing in the scanning electron microscope

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Description

The procedure used to measure laser target film thickness using a scanning electron microscope is summarized. This method is generally applicable to any coating on any substrate as long as the electron energy is sufficient to penetrate the coating and the substrate produces an x-ray signal which can pass back through the coating and be detected. (MOW)

Physical Description

Pages: 7

Creation Information

Elliott, N.E.; Anderson, W.E.; Archuleta, T.A. & Stupin, D.M. January 1, 1981.

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Description

The procedure used to measure laser target film thickness using a scanning electron microscope is summarized. This method is generally applicable to any coating on any substrate as long as the electron energy is sufficient to penetrate the coating and the substrate produces an x-ray signal which can pass back through the coating and be detected. (MOW)

Physical Description

Pages: 7

Notes

NTIS, PC A02/MF A01.

Source

  • American Vacuum Society national symposium, Anaheim, CA, USA, 3 Nov 1981

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Identifier

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  • Other: DE82000558
  • Report No.: LA-UR-81-2723
  • Report No.: CONF-811113-23
  • Grant Number: W-7405-ENG-36
  • Office of Scientific & Technical Information Report Number: 6087816
  • Archival Resource Key: ark:/67531/metadc1110178

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Office of Scientific & Technical Information Technical Reports

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Office of Scientific and Technical Information (OSTI) is the Department of Energy (DOE) office that collects, preserves, and disseminates DOE-sponsored research and development (R&D) results that are the outcomes of R&D projects or other funded activities at DOE labs and facilities nationwide and grantees at universities and other institutions.

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Creation Date

  • January 1, 1981

Added to The UNT Digital Library

  • Feb. 22, 2018, 7:45 p.m.

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  • May 30, 2018, 1:09 p.m.

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Elliott, N.E.; Anderson, W.E.; Archuleta, T.A. & Stupin, D.M. Thin-film thickness measurement using x-ray peak ratioing in the scanning electron microscope, article, January 1, 1981; New Mexico. (digital.library.unt.edu/ark:/67531/metadc1110178/: accessed August 15, 2018), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.