Vacuum behavior of the x-ray lithography source

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Photon stimulated desorption, PSD, is the major source of the gas load in electron storage rings and therefore strongly influences both beam lifetime and beam quality. The 200 MeV compact ring at the NSLS is an ideal tool to study PSD since its energy can be varied from 60 to 200 MeV and the photoelectrons produced by synchrotron radiation can be measured in clearing electrodes installed to collect trapped ions. Using these electrodes we show: (1) photoelectrons are produced only by photons having energy above 10eV and (2) desorption is proportional to the number of photoelectrons. Using calibrated gauges we ... continued below

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Halama, H.J. & Murphy, J.B. January 1, 1991.

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Photon stimulated desorption, PSD, is the major source of the gas load in electron storage rings and therefore strongly influences both beam lifetime and beam quality. The 200 MeV compact ring at the NSLS is an ideal tool to study PSD since its energy can be varied from 60 to 200 MeV and the photoelectrons produced by synchrotron radiation can be measured in clearing electrodes installed to collect trapped ions. Using these electrodes we show: (1) photoelectrons are produced only by photons having energy above 10eV and (2) desorption is proportional to the number of photoelectrons. Using calibrated gauges we conclude that (1) time-integrated beam current of 10--20 Ampere-hours is needed for initial vacuum chamber clean-up, (2) venting the chamber to dry nitrogen has a negligible effect on subsequent desorption and (3) venting to air requires about 10 Ampere-hours of beam conditioning.

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Pages: (12 p)

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OSTI; NTIS; GPO Dep.

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  • 38. national symposium of the American Vacuum Society, Seattle, WA (United States), 11-15 Nov 1991

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  • Other: DE92007172
  • Report No.: BNL-46996
  • Report No.: CONF-911132--19
  • Grant Number: AC02-76CH00016
  • Office of Scientific & Technical Information Report Number: 5949642
  • Archival Resource Key: ark:/67531/metadc1097500

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Office of Scientific & Technical Information Technical Reports

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  • January 1, 1991

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  • Feb. 18, 2018, 3:59 p.m.

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  • April 23, 2018, 12:53 p.m.

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Halama, H.J. & Murphy, J.B. Vacuum behavior of the x-ray lithography source, article, January 1, 1991; Upton, New York. (digital.library.unt.edu/ark:/67531/metadc1097500/: accessed October 22, 2018), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.