Statistical and signal-processing concepts in surface metrology

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Description

This paper proposes the use of a simple two-scale model of surface roughness for testing and specifying the topographic figure and finish of synchrotron-radiation mirrors. In this approach the effects of figure and finish are described in terms of their slope distribution and power spectrum, respectively, which are then combined with the system point spread function to produce a composite image. The result can be used to predict mirror performance or to translate design requirements into manufacturing specifications. Pacing problems in this approach are the development of a practical long-trace slope-profiling instrument and realistic statistical models for figure and finish ... continued below

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Pages: 10

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Church, E.L. & Takacs, P.Z. March 1, 1986.

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Description

This paper proposes the use of a simple two-scale model of surface roughness for testing and specifying the topographic figure and finish of synchrotron-radiation mirrors. In this approach the effects of figure and finish are described in terms of their slope distribution and power spectrum, respectively, which are then combined with the system point spread function to produce a composite image. The result can be used to predict mirror performance or to translate design requirements into manufacturing specifications. Pacing problems in this approach are the development of a practical long-trace slope-profiling instrument and realistic statistical models for figure and finish errors.

Physical Description

Pages: 10

Notes

NTIS, PC A02/MF A01.

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  • SPIE technical symposium on applications of artificial intelligence, Orlando, FL, USA, 31 Mar 1986

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  • Other: DE86014176
  • Report No.: BNL-38387
  • Report No.: CONF-860366-10
  • Grant Number: AC02-76CH00016
  • Office of Scientific & Technical Information Report Number: 5510948
  • Archival Resource Key: ark:/67531/metadc1093380

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Office of Scientific & Technical Information Technical Reports

Reports, articles and other documents harvested from the Office of Scientific and Technical Information.

Office of Scientific and Technical Information (OSTI) is the Department of Energy (DOE) office that collects, preserves, and disseminates DOE-sponsored research and development (R&D) results that are the outcomes of R&D projects or other funded activities at DOE labs and facilities nationwide and grantees at universities and other institutions.

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  • March 1, 1986

Added to The UNT Digital Library

  • Feb. 10, 2018, 10:06 p.m.

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  • March 23, 2018, 1:29 p.m.

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Church, E.L. & Takacs, P.Z. Statistical and signal-processing concepts in surface metrology, article, March 1, 1986; United States. (digital.library.unt.edu/ark:/67531/metadc1093380/: accessed October 19, 2018), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.