Magnetron co-sputtering system for coating ICF targets

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Description

Fabrication of Inertial Confinement Fusion (ICF) targets requires deposition of various types of coatings on microspheres. The mechanical strength, and surface finish of the coatings are of concern in ICF experiments. The tensile strength of coatings can be controlled through grain refinement, selective doping and alloy formation. We have constructed a magnetron co-sputtering system to produce variable density profile coatings with high tensile strength on microspheres.

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Pages: 17

Creation Information

Hsieh, E.J.; Meyer, S.F.; Halsey, W.G.; Jameson, G.T. & Wittmayer, F.J. September 9, 1981.

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Description

Fabrication of Inertial Confinement Fusion (ICF) targets requires deposition of various types of coatings on microspheres. The mechanical strength, and surface finish of the coatings are of concern in ICF experiments. The tensile strength of coatings can be controlled through grain refinement, selective doping and alloy formation. We have constructed a magnetron co-sputtering system to produce variable density profile coatings with high tensile strength on microspheres.

Physical Description

Pages: 17

Notes

NTIS, PC A02/MF A01.

Source

  • American Vacuum Society national symposium, Anaheim, CA, USA, 3 Nov 1981

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  • Other: DE82006926
  • Report No.: UCRL-86160
  • Report No.: CONF-811113-48
  • Grant Number: W-7405-ENG-48
  • Office of Scientific & Technical Information Report Number: 5622798
  • Archival Resource Key: ark:/67531/metadc1093126

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Office of Scientific & Technical Information Technical Reports

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Creation Date

  • September 9, 1981

Added to The UNT Digital Library

  • Feb. 10, 2018, 10:06 p.m.

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  • April 26, 2018, 7:02 p.m.

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Hsieh, E.J.; Meyer, S.F.; Halsey, W.G.; Jameson, G.T. & Wittmayer, F.J. Magnetron co-sputtering system for coating ICF targets, article, September 9, 1981; [Livermore,] California. (digital.library.unt.edu/ark:/67531/metadc1093126/: accessed September 26, 2018), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.