Structural alterations in SiC as a result of Cr/sup +/ and N/sup +/ implantation

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Ion scattering and channeling techniques were used to study production of disorder and randomization of SiC by implantation of Cr/sup +/ and N/sup +/ at doses of up to 3 x 10/sup 16/ /cm/sup 2/ for Cr/sup +/ and 8 x 10/sup 16/ /cm/sup 2/ for N/sup +/. Experiments were designed so that the calculated damage energy profiles would be well matched for the two ion species. The results were compared for the degree of effectiveness of Cr/sup +/ and N/sup +/ in producing disorder. At higher doses, Cr/sup +/ was much more effective than N/sup +/ for a given ... continued below

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Pages: 21

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Williams, J.M.; McHargue, C.J. & Appleton, B.R. January 1, 1982.

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Description

Ion scattering and channeling techniques were used to study production of disorder and randomization of SiC by implantation of Cr/sup +/ and N/sup +/ at doses of up to 3 x 10/sup 16/ /cm/sup 2/ for Cr/sup +/ and 8 x 10/sup 16/ /cm/sup 2/ for N/sup +/. Experiments were designed so that the calculated damage energy profiles would be well matched for the two ion species. The results were compared for the degree of effectiveness of Cr/sup +/ and N/sup +/ in producing disorder. At higher doses, Cr/sup +/ was much more effective than N/sup +/ for a given damage energy using the same calculational method for Cr/sup +/ as for N/sup +/. In correlated studies of swelling, both species had about the same effectiveness in producing swelling.

Physical Description

Pages: 21

Notes

NTIS, PC A02/MF A01.

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  • International conference on ion beam modification of materials, Grenoble, France, 6 Sep 1982

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  • Other: DE84000642
  • Report No.: CONF-820945-13
  • Grant Number: W-7405-ENG-26
  • Office of Scientific & Technical Information Report Number: 5668617
  • Archival Resource Key: ark:/67531/metadc1093124

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Office of Scientific & Technical Information Technical Reports

Reports, articles and other documents harvested from the Office of Scientific and Technical Information.

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  • January 1, 1982

Added to The UNT Digital Library

  • Feb. 10, 2018, 10:06 p.m.

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  • April 16, 2018, 12:15 p.m.

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Williams, J.M.; McHargue, C.J. & Appleton, B.R. Structural alterations in SiC as a result of Cr/sup +/ and N/sup +/ implantation, article, January 1, 1982; Tennessee. (digital.library.unt.edu/ark:/67531/metadc1093124/: accessed September 22, 2018), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.