Excimer laser chemical problems Metadata

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  • Main Title Excimer laser chemical problems


  • Author: Tennant, R.
    Creator Type: Personal
  • Author: Peterson, N.
    Creator Type: Personal


  • Name: Los Alamos National Laboratory
    Place of Publication: New Mexico
    Additional Info: Los Alamos National Lab., NM (USA)


  • Creation: 1982-01-01


  • English


  • Content Description: Techniques need to be developed to maintain XeF and XeCl laser performance over long periods of time without degradation resulting from chemical processes occurring within the laser. The dominant chemical issues include optical damage, corrosions of laser materials, gas contamination, and control of halogen concentration. Each of these issues are discussed and summarized. The methods of minimizing or controlling the chemical processes involved are presented.
  • Physical Description: Pages: 82


  • Keyword: Corrosion
  • Keyword: Halogen Compounds
  • Keyword: Particulates
  • Keyword: Chemical Reactions
  • Keyword: Getters
  • Keyword: Fluorides
  • Keyword: Rare Gas Compounds
  • Keyword: Halides
  • Keyword: Gas Lasers
  • Keyword: Lasers
  • Keyword: Absorption Spectra
  • Keyword: Xenon Compounds 420300* -- Engineering-- Lasers-- (-1989)
  • Keyword: Purification
  • Keyword: Spectra
  • Keyword: Xenon Fluorides
  • STI Subject Categories: 42 Engineering
  • Keyword: Particles
  • Keyword: Excimer Lasers
  • Keyword: Temperature Effects
  • Keyword: Contamination
  • Keyword: Fluorine Compounds


  • Other Information: Paper copy only, copy does not permit microfiche production


  • Name: Office of Scientific & Technical Information Technical Reports
    Code: OSTI


  • Name: UNT Libraries Government Documents Department
    Code: UNTGD

Resource Type

  • Report


  • Text


  • Other: DE85011051
  • Report No.: LA-UR-82-2268
  • Grant Number: W-7405-ENG-36
  • DOI: 10.2172/5487212
  • Office of Scientific & Technical Information Report Number: 5487212
  • Archival Resource Key: ark:/67531/metadc1092992


  • Display Note: NTIS, PC A05; 3.