Excimer laser chemical problems Page: 75 of 82
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NF, PARTIAL PRESSURE (torry
NF3 PARTIAL PRESSURE vs time
LASER ORERATM0 AT 55 Hz
GAS MIXTURE1 03% NFS
a75% X*
BALANCE He
TIME (min.)
API-VC-10 4*0
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Tennant, R. & Peterson, N. Excimer laser chemical problems, report, January 1, 1982; New Mexico. (https://digital.library.unt.edu/ark:/67531/metadc1092992/m1/75/: accessed April 23, 2024), University of North Texas Libraries, UNT Digital Library, https://digital.library.unt.edu; crediting UNT Libraries Government Documents Department.