Excimer laser chemical problems Page: 6 of 82
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Another possibility for keeping psrticulstes off 11.- u| ' in to um
electrostatic techniques such as described in Ref. ]. The t'anc ae*s«g< it.
that the optics will have to be actively protected to ensure 10*^ pulse lasei
systea lifetiaes. The next section will show bow bad the particulate accuau-
lation can be.
The attthod for aaintaining clean optics with a ground based XeF laser can
be significantly different froa XeCl. Since XeF with requires so aurh
aore gas reprocessing there should be plenty of clean gas for flushing optics.
The reprocessing rate is of the order of 1 sefa per Joule of laser output.
Likewise, since the laser is sore accessible, the systea lifetiae requireswrnt
between aaintenance periods is probably of the order of 10 pulses or less. A
101 energy loss due to dirty optics for 10 pulses is attainable with currently
deaonstrated flushing approaches.
3.0 Materials Suaxsary
To date about 3 (10 ) pulses over about 3 years have been accuaulated on
the Luaonics 861 laser. During this tiaw and clso previously the effects of
HC1, KFj, and F^ on various aetallic and dielectric parts have been studied.
Metals studied include inconel, copper, brass, stainless steel, aluninua,
aonel, titaniua, and nickei. Dielectrics studied include Al^O^, epoxy, kynar,
polyethylene, teflon, lexan, plexiglax, Kel-F, PVC, etc.
The varioux aetals that have been studied correspond closely to the ordet
shown in Table I as far as usefulness with sad Hoi That is, of the materials
tested, nickel has the lowest corrosion rate of the structural aetals for both
AC1 sod Fj. Platinua and gold were not tested. Table II describes the condition
of various aetals after prolonged MCI exposure. As it turns out, nickel is
the aost durable aetsl tested to date followed by Inconel feu HC1 and Monel
for F^ as close seconds.
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Tennant, R. & Peterson, N. Excimer laser chemical problems, report, January 1, 1982; New Mexico. (https://digital.library.unt.edu/ark:/67531/metadc1092992/m1/6/: accessed April 21, 2019), University of North Texas Libraries, Digital Library, https://digital.library.unt.edu; crediting UNT Libraries Government Documents Department.