Excimer laser chemical problems Page: 5 of 82
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« buffer zone over the optics. With this configuration shout 1% of the output
energy is lost for each 10^ pulses accumulated as coopered tc sb'ut IT per SO6
pulses without the flushiag. For the Lumonics laser we have used as little as
S standard liters per nimute of flow at 3 eta pressure per window. The injection
flow required will increase as flow rate within the lawer increases; hence, an
operational XeCl laser say require as much as 100 tines nore flow than t'oes a
Lumonics laser. Another flushing gossttry which used all radial flow has s'so
been tested throughout the last pear on our Engineering Develcpawnt Spsten
(EDS) laser. Our conclusion is that radial flow alone works very poorly when
compared to the mixture of radial and tangential flow,at least at flush flow
rates up to 2.5 sefn.
Reviewing the XeCl requirements for maintaining clean optica for a space
based 1010 pulse systems indicate that flushing optica with a rare gas (i.c.
halogen, particulates, and contaminants ream wed) is probably out of the question
To do such would require s cleanup spsten about 100 time larger than is
required to maintain gas purity. There are several approaches whicn may work,
however. One possibility would be to flush the optics with gas which is
filtered end possibly run through a cold hast (130 K) exchanger to reamve
particulates and chlorocarbooa. Unfortunately, Los Alamos experience with
this approach indicates that SCI and uv photons at an optic surface still
leaves a reaction product - perhaps due to a pbotochsmical reaction of the HC1
sod the O-rtng. Another approach is to filter the particulates out of the
laser gas at a sufficient rate to maiatain • very low background level of
particM'iites in the laser and to reprocasa the laser gas with a getter trap
system st. a rate sufficient to keep chlorocarboes he aa acceptable level.
This approach may work if the laaar uystam has very little plaatic naterials
which form chlorocsrbons which mey piiotolyse to carbon on the output coupler
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Tennant, R. & Peterson, N. Excimer laser chemical problems, report, January 1, 1982; New Mexico. (https://digital.library.unt.edu/ark:/67531/metadc1092992/m1/5/: accessed April 21, 2019), University of North Texas Libraries, Digital Library, https://digital.library.unt.edu; crediting UNT Libraries Government Documents Department.