Excimer laser chemical problems Page: 4 of 82
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resist* to erosion under halogen and discharge conditions, lor an x-ray
window el. ‘rode there is s real problem in coming up with t suitable material
that will still pass arrays. To date at Los Alamos, aluminum has been used.
Perhaps if a gl><w discharge can he maintained, a nickel coating cn the x*ray
window electrodes would hold up well enough to give long life but this is
In the presence of uv photons, chlorocarbons and fluorocarbons are photo-
lyxed to carbon which collects on the output coupler. Tnese chlorocarbons and
fluorocarbons result mostly from halogen reactions with dielectrics (including
O-rings) within tike laser. The use of swtal optical mounts and fluoroplastics
greatly reduce the formation of carbon type residues. For 10 pulse life
systems such as for XeF, the use of fluoroplastics is probably acceptable.
The 1010 pulse life systems such as for XeCl 99.95*4 pure ceramics such as
AljO^ and CaFj will be required.
To date all of the coatings hawe been surface deposits when MgF^ and CaFj
have been used for optics awterials. In most instances, scrubbing with a
detergent and water has been sufficient to clean the optics. Ja general, the
metallic chlorides are soluable in water whereas the fluorides are only slightly
Several techniques have been used to prevent coatings from accumulating
os the optics. Using nickel snd nickel coatings has reduced the formation of
metallic chlorides and fluorides. Eliminating plastics frou preionisers ar.d
other components near the discharge and laser bean region has reduced the
formation of chlorocarbons snd fluorocarbons. Also, flushing the optics with
clean rare gee prevents particulate build-up from being as severe a problem
The window flushing configuration which has been in use on the Lumonica laser
for the last two years has three radial and three tangential jets which create
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Tennant, R. & Peterson, N. Excimer laser chemical problems, report, January 1, 1982; New Mexico. (https://digital.library.unt.edu/ark:/67531/metadc1092992/m1/4/?rotate=270: accessed April 21, 2019), University of North Texas Libraries, Digital Library, https://digital.library.unt.edu; crediting UNT Libraries Government Documents Department.