Excimer laser chemical problems Page: 3 of 82
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EXCIMER LASER CHEMICAL PROBLEMS
Techniques bm4 to bt developed t« MlaUin UT tod XeCl laser performance
over long periods of time without degradation resulting from chemical processes
occurring within the laser. The dorinaot chemical issues include optical
damage, corrosions of laser materials, gas contamination, and control of
halogen concentration. Each of these issues will be discussed and sumsMrised.
The methods of minimising or controlling the chemical- processes involved will
2.0 Deterioration of Optics
With both X*F and XeCl excimer lasers, a coeting is deposited on optics
surfaces in contact with laser gas. In the case of XeF the coating results
from particulates, fInorocarftoni, and F^ or HI^ that are present inside the
laser. In the studies described in this report, the particulates originate
primarily in the preioniser and discharge region when the halogen reacts
under discharge conditions with the swtals of construction. The worst source
of particulates with the Lumonics Ml laser is the spark preionixer. The next
vorst source is the electrodes. The least worst source is everything else.
In the XeF and XeCl systems of interest to the Blue-Green Lier Prog ran, a
spark preioniser wouldn’t be used; heeifo, with the types of (.reioniser envisioned
for use (such as x-ray prolongation) the worst source of particulates has
At Los Alamos electrodes made of aluminum, atainleas steel, copper, brass,
Poco graphite, and nickel have bwen tested. Of these nickel is the most
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Tennant, R. & Peterson, N. Excimer laser chemical problems, report, January 1, 1982; New Mexico. (https://digital.library.unt.edu/ark:/67531/metadc1092992/m1/3/?rotate=180: accessed May 26, 2019), University of North Texas Libraries, Digital Library, https://digital.library.unt.edu; crediting UNT Libraries Government Documents Department.