Excimer laser chemical problems

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Description

Techniques need to be developed to maintain XeF and XeCl laser performance over long periods of time without degradation resulting from chemical processes occurring within the laser. The dominant chemical issues include optical damage, corrosions of laser materials, gas contamination, and control of halogen concentration. Each of these issues are discussed and summarized. The methods of minimizing or controlling the chemical processes involved are presented.

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Pages: 82

Creation Information

Tennant, R. & Peterson, N. January 1, 1982.

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Description

Techniques need to be developed to maintain XeF and XeCl laser performance over long periods of time without degradation resulting from chemical processes occurring within the laser. The dominant chemical issues include optical damage, corrosions of laser materials, gas contamination, and control of halogen concentration. Each of these issues are discussed and summarized. The methods of minimizing or controlling the chemical processes involved are presented.

Physical Description

Pages: 82

Notes

NTIS, PC A05; 3.

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  • Other Information: Paper copy only, copy does not permit microfiche production

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  • Other: DE85011051
  • Report No.: LA-UR-82-2268
  • Grant Number: W-7405-ENG-36
  • DOI: 10.2172/5487212 | External Link
  • Office of Scientific & Technical Information Report Number: 5487212
  • Archival Resource Key: ark:/67531/metadc1092992

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Office of Scientific & Technical Information Technical Reports

Reports, articles and other documents harvested from the Office of Scientific and Technical Information.

Office of Scientific and Technical Information (OSTI) is the Department of Energy (DOE) office that collects, preserves, and disseminates DOE-sponsored research and development (R&D) results that are the outcomes of R&D projects or other funded activities at DOE labs and facilities nationwide and grantees at universities and other institutions.

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Creation Date

  • January 1, 1982

Added to The UNT Digital Library

  • Feb. 10, 2018, 10:06 p.m.

Description Last Updated

  • May 29, 2018, 6:14 p.m.

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Tennant, R. & Peterson, N. Excimer laser chemical problems, report, January 1, 1982; New Mexico. (digital.library.unt.edu/ark:/67531/metadc1092992/: accessed July 17, 2018), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.