Analysis and evaluation in the production process and equipment area of the Low-Cost Solar Array Project. Quarterly report, January-April 1979 Page: 8 of 179
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LIST OF TABLES
Evaluation of Ion Implantation 15
for LSA Production
Technology Problems to be 31
Resolved for Successful Low
Cost Ion Implantation :
Technical and Economic Comparison 40 -
of Present and Proposed Junction'
Add-on Cost Components for 42
Motorola's 5-step Wet Chemical
Front Junction and BSF Sequence
LIST OF FIGURES
Principles of Ion Implanter Design 5
Source Life Expectancy as a Function 19
of Phosphorus Beam Current
Machine Cost per Unit beam Current as 29
a Function of Beam Current
Junction Formation Add-on Prices 43
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Goldman, H. & Wolf, M. Analysis and evaluation in the production process and equipment area of the Low-Cost Solar Array Project. Quarterly report, January-April 1979, report, June 1, 1979; United States. (https://digital.library.unt.edu/ark:/67531/metadc1092164/m1/8/: accessed April 26, 2019), University of North Texas Libraries, Digital Library, https://digital.library.unt.edu; crediting UNT Libraries Government Documents Department.